Inversion anti-integral saturation method for precision motion control

A precision motion, anti-integration technology, applied in electric controllers, controllers with specific characteristics, etc., can solve the problems of prone to integral saturation, prolonged positioning motion and uniform scanning motion establishment time, etc., to reduce the establishment time, The effect of reducing the positioning movement and the establishment time of constant speed scanning and improving work efficiency

Pending Publication Date: 2020-09-04
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The main purpose of this application is to provide an inversion anti-integral windup method for precision motion control, which aims to solve the problem of integral saturation that is prone to occur in t

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  • Inversion anti-integral saturation method for precision motion control
  • Inversion anti-integral saturation method for precision motion control
  • Inversion anti-integral saturation method for precision motion control

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[0047] In order to make the application objectives, features, and advantages of this application more obvious and understandable, the technical solutions in the embodiments of this application will be described clearly and completely in conjunction with the drawings in the embodiments of this application. Obviously, the description The embodiments are only a part of the embodiments of the present application, but not all the embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative work shall fall within the protection scope of this application.

[0048] See figure 1 , figure 1 This is a schematic flow chart of an inversion anti-integral-saturation motion control method for a precision motion platform provided by an embodiment of this application. The method mainly includes the following steps:

[0049] S101. Obtain the control value of the mechanical table body of the precision motion platform through t...

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Abstract

The invention discloses an inversion anti-integral saturation method for precision motion control, and the method comprises the steps: obtaining the control quantity of a mechanical platform body of aprecision motion platform through the position deviation between the reference position and the actual position of the mechanical platform body of the precision motion platform; enabling the controlquantity to pass through a preset saturation link and an advanced saturation link, and judging whether the control quantity is in a state about integral saturation or not; if the control quantity is in a state of being about to be subjected to integral saturation, obtaining a corrected control quantity according to the control quantity obtained by utilizing a preset saturation link and the controlquantity obtained by utilizing an advanced saturation link; and sending the corrected control quantity to a preset driver so as to drive the mechanical platform body of the precision motion platformto carry out positioning motion and uniform-speed scanning motion by utilizing the driver according to the corrected control quantity. The integral saturation phenomenon can be inhibited, and the positioning motion of a precision motion platform and the establishment time of constant-speed scanning are reduced.

Description

technical field [0001] The present application relates to the technical field of motion control, in particular to an inversion anti-integral windup method for precise motion control. Background technique [0002] Precision motion stages are commonly used in industries such as machine tool machining and semiconductor manufacturing. The motion time of typical positioning motion and scanning motion is equal to the sum of acceleration time, settling time, scanning time and deceleration time. The acceleration time and deceleration time are related to the maximum acceleration and maximum jerk of the displacement platform, the scanning time is determined by the scanning speed, and the establishment time is directly included in the total movement time. The movement time often affects the production efficiency of these devices. From the perspective of improving economic output, the precision motion platform should minimize the movement time of positioning movement and scanning movem...

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Application Information

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IPC IPC(8): G05B11/42
CPCG05B11/42
Inventor 武志鹏李璟谢冬冬王丹孟璐璐胡丹怡
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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