Micropump
A technology of micro-pumps and confluence chambers, which is applied in the direction of pumps, pumps with flexible working elements, liquid variable capacity machines, etc., and can solve problems such as uneven actuation
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[0045] Embodiments embodying the features and advantages of the present case will be described in detail in the description of the latter paragraph. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are essentially for illustrative purposes rather than limiting the present case.
[0046] see figure 1 , Figure 2A , Figure 2B and Figure 3A As shown, the micropump 1 of the present case includes an air intake plate 11 , a resonance plate 12 , a piezoelectric actuator 13 , an insulating sheet 14 and a conductive sheet 15 that are stacked in sequence.
[0047] The intake plate 11 has at least one intake hole 11a, at least one bus hole 11b and a confluence chamber 11c. The intake holes 11a and the bus holes 11b have the same number. In this embodiment, the intake holes The number of 11a and the busbar holes 11b is exemplified by four, but not li...
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