Main-sub clamp combined mechanism for defect detection of large-aperture optical element

Abstract

The invention discloses a main-sub clamp combined mechanism for defect detection of a large-aperture optical element. The main-sub clamp combined mechanism comprises a main clamp and a sub-clamp. According to the main-sub clamp combined mechanism for defect detection of the large-aperture optical element, the sub-clamp can be designed in a customized mode according to the aperture size of the optical element and is suitable for clamping optical elements with various thickness sizes, the optical element can be automatically pressed in the process of clamping the large-aperture optical element by the sub-clamp, and circumferential positioning is achieved, so that operation is convenient; according to the main-sub clamp combined mechanism for defect detection of the large-aperture optical element, after the large-aperture optical element is clamped, the inner end faces of four arc-shaped plates of a sub-clamp positioning plate make close contact with the inner end face of a main clamp positioning plate, the contact fit degree is only affected by the machining precision of the planeness of the inner end faces of the arc-shaped plates of the sub-clamp and the machining precision of theplaneness of the inner end face of the main clamp positioning plate, and a machining method is easier to implement; and according to the main-sub clamp combined mechanism for defect detection of the large-aperture optical element, after the large-aperture optical element is clamped, the large-aperture optical element is stably assembled on the main-sub clamp combined mechanism, so that the repeatability of an optical detection result is ensured.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to a combination mechanism of a sub-mother fixture for defect detection of large-diameter optical elements. Background technique [0002] For an optical system with a fixed focal plane, when testing optical components, it is required that the surface to be tested coincides with the focal plane of the optical system to ensure the accuracy and repeatability of optical testing. The fixture supporting the optical system needs to position the tested surface of the optical element clamped on it so that it coincides with the focal plane of the optical system. In addition, due to the caliber and thickness of the optical element, there are often various sizes and specifications. There is also a need to be able to accommodate changes in optical component size specifications. For optical testing instruments and equipment, the operation and use of fixtures are also required to be simple and co...

AI Technical Summary

Problems solved by technology

[0003] In the field of detection of large-diameter optical components, since the outer contour and thickness of optical components are generally large and heavy, the size of the supporting fixture mechanism is larger, and the machining accuracy of the larger mechanism components is often harder to get better guarantees

Images