Method for expanding aspheric surface direct interference detection dynamic range

Abstract

The invention provides a method for expanding an aspheric surface direct interference detection dynamic range. The aspheric direct interference detection dynamic range refers to the maximum aspheric degree of the aspheric surface which can be measured when the aspheric surface adopts non-zero direct interference detection, the closest comparison spherical surface of the aspheric surface is used asa detection wave surface, and an interference pattern is fully distributed on the whole detector and is just used for complete sampling. By changing the curvature radius of the detection wave surface, the distribution of interference fringes can be changed, so that the maximum aspheric degree of the aspheric surface for direct interference detection is increased, and the dynamic range of asphericsurface direct interference detection is expanded. According to the invention, an aspheric surface with a larger aspheric degree can be detected by using a direct interference detection method. The method reduces the difficulty of aspheric surface detection, improves the detection efficiency, reduces the detection cost, is reliable in theory, is simple, can remarkably improve the dynamic range ofaspheric surface non-zero interference detection, and is of great significance to the formulation of an aspheric surface detection scheme.

Description

technical field [0001] The invention belongs to the technical field of optical processing and optical detection, and in particular relates to a method for expanding the dynamic range of aspheric surface direct interference detection. Background technique [0002] Since an aspheric surface can provide more degrees of freedom than a spherical surface, the use of an aspheric surface in an optical system can significantly improve the overall performance of an optical instrument. However, after long-term research on aspheric surface technology, people have found that the factors that restrict the further wide application of aspheric surfaces are not only the processing methods and systems of aspheric surfaces, but also the aspheric surface detection technology. Fast and accurate aspheric surface processing is inseparable from fast and accurate aspheric surface detection technology. Since interference detection has the advantages of high detection accuracy and non-contact, it is ...

AI Technical Summary

Problems solved by technology

However, the dynamic range of aspheric non-zero detection determined by this method is relatively small, and the advantages of aspheric non-zero detection cannot be fully utilized.

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