Positioning method and positioning device for target position of semiconductor chip sample
A technology of target position and positioning method
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[0027] A method for locating a target position of a semiconductor chip sample and a device 1000 for locating a target position of a semiconductor chip sample proposed by the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0028] The method for locating the target position of a semiconductor chip sample according to an embodiment of the present invention will be described below with reference to the accompanying drawings. figure 1 and Figure 3-Figure 5 As shown, the positioning method of the semiconductor chip sample target position according to the embodiment of the present invention includes the following steps:
[0029] S1: provide a semiconductor chip sample 100; for the semiconductor chip sample 100, if image 3 As shown, the semiconductor chip sample 100 may include an interlayer dielectric layer 2 and a device region layer 3, the interlayer dielectric layer 2 is located above the device...
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