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Developing nozzle

A sprinkler and integrated technology, applied in the field of developing sprinklers, can solve problems such as affecting work efficiency, water stains and easy corrosion of threads, sprinkler falling, etc., to avoid affecting work efficiency, facilitating auxiliary work, and preventing sprinklers from falling.

Pending Publication Date: 2020-10-30
芯米(厦门)半导体设备有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] For the existing developing nozzle, the nozzle and the external developing machine are usually fixed by thread, and after a long time, water stains are easy to corrode the thread, so the fixing effect is poor, and the nozzle is easy to fall off. Problems that in turn affect work efficiency

Method used

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Embodiment Construction

[0025] In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further described below in conjunction with specific embodiments.

[0026] see figure 1 , figure 2 , image 3 , Figure 4 and Figure 5 , the present invention provides a developing spray head: comprising a first fixing block 1 , an auxiliary mechanism 2 and a fixing device 3 . The middle part of the upper end of the first fixed block 1 is fixed with the limiting case 4 , and the middle part of the upper end of the limiting case 4 is provided with a spout 5 . A limiting ring 6 is provided on the lower surface of the limiting shell 4 . The limit case 4 is fixed into one body with the fixed rod 7 under the order, and the lower end surface of the fixed rod 7 is provided with a screw thread 8 . The upper end of the auxiliary mechanism 2 is in close contact with the first fixing block 1, and the lower end of the...

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Abstract

The invention discloses a developing nozzle. The developing nozzle structurally comprises a first fixing block, wherein an auxiliary mechanism is arranged at a lower end of the first fixing block, andthree clamping blocks are pulled to be matched with three torsion springs to work. The developing nozzle is advantaged in that the clamping blocks are opened to be fixed with an external part, the fixing device is arranged in the middle of a front end of the first fixing block, and a threaded rod is rotated to be inserted into a limiting groove, so a spring is ejected out to enable a convex blockto limit and fix the fixing groove, and the advantage of facilitating auxiliary work of the auxiliary mechanism is achieved.

Description

technical field [0001] The invention relates to a developing nozzle, which belongs to the field of developing nozzles. Background technique [0002] The developer is coated on the surface of the exposed wafer, the exposed area of ​​the positive resist and the non-exposed area of ​​the negative resist are dissolved in the developer, and after the reaction polymer and the residue of the developer are rinsed, the photolithography can be revealed. The graphics in the glue, with the development of semiconductor technology, has higher and higher requirements for development; and a nozzle is required to spray the developer evenly on the wafer. [0003] Due to the existing developing nozzle, the nozzle and the external developing machine are usually fixed by threads, and after a long time, water stains are easy to corrode the threads, so the fixing effect is poor, and the nozzle is easy to fall off, which affects the work. efficiency. Contents of the invention [0004] For the e...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/30
CPCG03F7/30
Inventor 徐权锋
Owner 芯米(厦门)半导体设备有限公司
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