Phase shifter with flexible plate structure

A flexible plate and phase shifter technology, applied in the field of interferometer components, can solve problems such as reduced recovery performance, position deviation, and short service life, and achieve the effects of improving work efficiency, reducing losses, and increasing service life

Pending Publication Date: 2020-11-03
SHANGHAI STEM YAO OPTICAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The phase shifter is supported by a single point, which has defects such as position deviation of the phase shift, reduction in recovery p

Method used

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  • Phase shifter with flexible plate structure

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Embodiment Construction

[0016] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.

[0017] Such as figure 1 As shown, the flexible plate structure phase shifter includes a base 8 and a main body 1 .

[0018] The inside of the base is a working chamber. The main body 1 is arranged above the base 8 . A vertical actuator assembly is installed in the base 8 . The actuator assembly is electrically connected with a wire harness assembly, the wire harness assembly is connected with a wire harness connector, and a wire buckle 6 is sleeved on the wire harness connector. A through hole 7 is provided on the side of the base, and the wire tie 6 is installed on the through hole 7 . A flexible board assembly is installed on the top of the actuator assembly, a...

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PUM

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Abstract

The invention discloses a phase shifter with a flexible plate structure. The phase shifter comprises a base and a main body, a working cavity is formed in the base; wherein the main body is arranged above the base; a vertical actuator assembly is mounted in the base; the actuator assembly is electrically connected with the wire harness assembly, the wire harness assembly is connected with the wireharness connector, and the wire harness connector is sleeved with the wire buckle. A through hole is formed in the side face of the base, and the wire buckle is installed in the through hole. The topof the actuator assembly is provided with a flexible plate assembly, and the main body is fixed on the flexible plate assembly. Position deviation cannot be generated, the service life is greatly prolonged, enterprises are indirectly helped to reduce losses, and the working efficiency of the horizontal interferometer is improved.

Description

technical field [0001] The invention relates to the field of interferometer components, in particular to a phase shifter with a flexible plate structure. Background technique [0002] At present, in the field of interferometer detection, it is more and more widely used to calculate the quality of the measured sample reflected by the interferometer fringes through computer algorithms. In the interferometric phase shifting algorithm, it is required to have a sub-micron displacement between the measured sample and the standard lens, and the displacement curve of each point on the end surface of the moved object is consistent, stable and recoverable. This is the role of the phase shifter. [0003] When the interferometer is calculated by software, it cannot obtain a stable, precise, and recoverable displacement, which often brings a large displacement error, resulting in a large difference between the final calculation result and the actual value, which ultimately affects the co...

Claims

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Application Information

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IPC IPC(8): G01N21/45G01N21/01G01M11/00G01J9/02
CPCG01J9/02G01M11/00G01N21/01G01N21/45G01N2021/458
Inventor 汤明智
Owner SHANGHAI STEM YAO OPTICAL TECH CO LTD
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