A microfluidic inertial switch fabrication method based on graphene-coated gallium-based alloy droplets
A technology of graphene coating and manufacturing method, which is applied in the field of microfluidic inertial switch manufacturing based on graphene-coated gallium-based alloy droplets, which can solve problems affecting the performance of the switch, the limitation of the use range, and the high toxicity of mercury.
Active Publication Date: 2022-05-27
DALIAN UNIV OF TECH
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Problems solved by technology
However, mercury is highly toxic and volatile, and its use is limited based on environmental and health considerations
Gallium-based alloy has low toxicity and low vapor pressure, but it is easily oxidized to form a thin oxide layer, which is easy to adhere to the surface of the microchannel, thus affecting the performance of the switch
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[0022] The embodiments of the present invention will be described in detail below with reference to the technical solutions and the accompanying drawings.
[0023] A method for manufacturing a microfluidic inertial switch based on graphene-coated gallium-based alloy droplets, comprising the following steps:
[0024] Step 1: Fabrication of graphene-coated gallium-based alloy droplets, such as figure 1 .
[0025] The gallium-based alloy 1, specifically the gallium-indium-tin alloy, with a volume of 65 nanoliters was extracted by a micro-injector, and it was dropped into a petri dish covered with graphene powder 2. By shaking the petri dish, the gallium-indium-tin alloy liquid The droplet is fully rolled in the graphene powder 2, and a layer of dense and uniform graphene can be coated on the surface of the gallium indium tin alloy droplet to obtain a graphene-coated gallium-based alloy droplet 3.
[0026] Step 2: Make glass coverslips containing fixed electrodes, such as fig...
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The invention discloses a method for manufacturing a microfluidic inertial switch based on graphene-coated gallium-based alloy droplets, and belongs to the technical field of micro-electromechanical system micromachining. The method begins by fabricating graphene-coated gallium-based alloy droplets. Secondly, the glass cover slip containing fixed electrodes and the PDMS substrate containing microchannels were sequentially fabricated. Finally, the surfaces of the cover glass and the PDMS substrate were treated with oxygen plasma, and the graphene-coated gallium-based alloy droplets were placed into the microchannel to complete the bonding of the two. The microfluidic inertial switch manufactured by the present invention uses graphene with high lubricity and high conductivity to coat the gallium-based alloy droplet, which can effectively avoid the adhesion of the oxide layer of the gallium-based alloy to the surface of the microchannel in the switch. At the same time, the good conductive properties of the droplets can still be maintained.
Description
technical field [0001] The invention belongs to the technical field of micro-electromechanical system (MEMS) micro-processing, and relates to a manufacturing method of a micro-fluid inertia switch based on graphene-coated gallium-based alloy droplets. [0002] technical background [0003] Micro-inertial switch is a precision device that realizes switching on and off by sensing threshold acceleration. Because of its small size, low power consumption, and fast response speed, it is widely used in weapon systems, automobiles, gesture recognition and other fields. At present, micro-inertial switches are mainly divided into two categories: "solid-solid" contact type and "solid-liquid" contact type. The "solid-solid" contact micro-inertial switch is the traditional mechanical micro-inertial switch, and there are problems such as contact wear, signal jump, and large contact resistance when the electrodes are in contact, which affects the performance of the switch. In order to over...
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IPC IPC(8): H01H29/00H01H29/06H01H11/00B81B7/02B81C1/00B81C3/00
CPCH01H29/002H01H29/06H01H11/00B81C1/00015B81C3/001B81B7/02B81C2203/03B81B2201/01
Inventor 刘军山赵欣悦杨圳威谭智广刘泽汉
Owner DALIAN UNIV OF TECH