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Resistance measuring apparatus, film manufacturing apparatus, and manufacturing method of conductive film

A conductive film, resistance measurement technology, applied in the measurement device, measurement of electrical variables, measurement of resistance / reactance / impedance and other directions, can solve problems such as poor surface resistance quality, to achieve the effect of uniform sheet resistance

Active Publication Date: 2022-07-19
NITTO DENKO CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The manufactured conductive film requires its surface resistance (sheet resistance) to be within the desired range, therefore, it is necessary to measure the surface resistance to find that the quality of the surface resistance is poor

Method used

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  • Resistance measuring apparatus, film manufacturing apparatus, and manufacturing method of conductive film
  • Resistance measuring apparatus, film manufacturing apparatus, and manufacturing method of conductive film
  • Resistance measuring apparatus, film manufacturing apparatus, and manufacturing method of conductive film

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Embodiment Construction

[0037] exist figure 1 In the drawing, the left-right direction of the drawing is the conveying direction (the first direction, the longitudinal direction, the first direction), the right side of the drawing is the downstream side of the conveying direction (the first direction side, the lengthwise side), and the left side of the drawing is the conveying direction The upstream side (the other side in the first direction, the other side in the longitudinal direction). The thickness direction of the paper is the width direction (the second direction perpendicular to the first direction), the front side of the paper is the width direction side (the second direction side), and the deep side of the paper surface is the other side in the width direction (the second direction). The other side). The upper and lower directions of the paper are the up-down direction (the third direction orthogonal to the first and second directions, the thickness direction), the upper side of the paper...

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Abstract

A resistance measuring apparatus is an apparatus for measuring the sheet resistance of a conductive film that is long in one direction, and is characterized by comprising: a detection unit arranged to face the conductive film; and a scanning unit that causes the detection unit to cross the conductive film The two regions of the transport region and the non-transport region are scanned in a cross direction intersecting with one direction; and an arithmetic unit that calculates the sheet resistance of the conductive film based on the voltage measured by the detection unit, the arithmetic unit has a value stored in the non-transport area. The storage of the reference voltages measured in the delivery area corrects, based on the reference voltage, the actual voltage measured by the detection unit scanning the delivery area in the cross direction.

Description

technical field [0001] The present invention relates to a resistance measuring apparatus, a film manufacturing apparatus, and a method for manufacturing a conductive film. Background technique [0002] Conventionally, a conductive film is produced by laminating a conductive film on a base film by a roll-to-roll method. Since the surface resistance (sheet resistance) of the produced conductive film is required to be in a desired range, it is necessary to measure the surface resistance to find out the quality of the surface resistance. As the method, there is known a method of measuring the surface resistance of the conductive film using a non-contact resistance measuring device before winding the conductive film (for example, refer to the following Patent Document 1). [0003] The non-contact surface resistance measurement device of the following Patent Document 1 includes an eddy current sensor including an eddy current generation unit and an eddy current detection unit, an...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R27/02C23C14/34C23C14/54C23C14/56G01R35/00
CPCG01R27/02C23C14/54C23C14/34G01N27/902C23C14/562C23C14/52G01R27/08G01R35/00C23C14/56G01N27/90
Inventor 森光大树
Owner NITTO DENKO CORP
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