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Resistance measurement device, film manufacturing device, and conductive film manufacturing method

A conductive film, resistance measurement technology, used in measurement devices, parts of electrical measurement instruments, measurement of electrical variables, etc., can solve problems such as poor surface resistance quality

Active Publication Date: 2020-10-23
NITTO DENKO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The manufactured conductive film requires its surface resistance (sheet resistance) to be within the desired range, therefore, it is necessary to measure the surface resistance to find that the quality of the surface resistance is poor

Method used

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  • Resistance measurement device, film manufacturing device, and conductive film manufacturing method
  • Resistance measurement device, film manufacturing device, and conductive film manufacturing method
  • Resistance measurement device, film manufacturing device, and conductive film manufacturing method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach

[0036] 1. Membrane manufacturing device

[0037] refer to figure 1 ˜ FIG. 3 illustrate a film manufacturing apparatus 1 according to an embodiment of the present invention. figure 1 The shown film manufacturing apparatus 1 is an apparatus for manufacturing a conductive film 2 that is long in the conveying direction (one direction), and includes a lamination conveying device 3 and a resistance measuring device 4 .

[0038] [Stacking conveying device]

[0039] Such as figure 1 As shown, the lamination conveyance apparatus 3 has the delivery unit 5, the sputtering unit 6 which is an example of a lamination unit, and the take-up unit 7.

[0040] The delivery unit 5 has a delivery roller 11 , a first guide roller 12 , and a delivery chamber 13 .

[0041] The sending-out roller 11 is a cylindrical member having a rotation shaft for sending out the base film 10 . The delivery roller 11 is disposed most upstream in the transport direction of the stack transport device 3 . A mot...

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Abstract

This resistance measurement device is for measuring the sheet resistance of a conductive film that is elongated in one direction. The resistance measurement device comprises: two probes that are disposed so as to oppose each other with a space interposed therebetween such that the probes do not come into contact with the conductive film and the conductive film can be interposed between the probes;a scanning unit for scanning the two probes in an intersecting direction intersecting the one direction; and a calculation unit for calculating the sheet resistance of the conductive film on the basis of voltages measured by the two probes. The calculation unit has a memory for storing a reference voltage measured by scanning the two probes in the intersecting direction without the conductive film interposed therebetween. An actual voltage measured by scanning the two probes in the intersecting direction with the conductive film interposed therebetween is corrected on the basis of the reference voltage.

Description

technical field [0001] The present invention relates to a resistance measuring device, a film manufacturing device, and a method for manufacturing a conductive film. Background technique [0002] Conventionally, a conductive film is produced by laminating a conductive film on a base film by a roll-to-roll method. The manufactured conductive film is required to have its surface resistance (sheet resistance) within a desired range, and therefore, it is necessary to measure the surface resistance to find out that the quality of the surface resistance is poor. As the method, there is known a method of measuring the surface resistance of a conductive film using a non-contact resistance measuring device before winding up the conductive film (for example, refer to Patent Document 1). [0003] The non-contact surface resistance measurement device of Patent Document 1 includes: an eddy current sensor composed of an eddy current generating unit and an eddy current detecting unit; and...

Claims

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Application Information

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IPC IPC(8): G01R27/02C23C14/34C23C14/54C23C14/56G01R35/00
CPCG01R35/00G01R27/08C23C14/52C23C14/545C23C14/562C23C14/205G01R1/07392C23C14/34C23C14/54C23C14/56G01R31/002
Inventor 森光大树
Owner NITTO DENKO CORP
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