Resistance measuring apparatus, film manufacturing apparatus, and manufacturing method of conductive film

A conductive film and resistance measurement technology, which is used in measurement devices, parts of electrical measurement instruments, and measurement of electrical variables, etc., can solve problems such as poor surface resistance quality, and achieve the effect of improving measurement accuracy.

Active Publication Date: 2022-07-19
NITTO DENKO CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The manufactured conductive film requires its surface resistance (sheet resistance) to be within the desired range, therefore, it is necessary to measure the surface resistance to find that the quality of the surface resistance is poor

Method used

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  • Resistance measuring apparatus, film manufacturing apparatus, and manufacturing method of conductive film
  • Resistance measuring apparatus, film manufacturing apparatus, and manufacturing method of conductive film
  • Resistance measuring apparatus, film manufacturing apparatus, and manufacturing method of conductive film

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Embodiment Construction

[0034] exist figure 1 In the drawing, the left-right direction of the drawing is the conveying direction (the first direction, the longitudinal direction, the first direction), the right side of the drawing is the downstream side of the conveying direction (the first direction side, the lengthwise side), and the left side of the drawing is the conveying direction The upstream side (the other side in the first direction, the other side in the longitudinal direction). The thickness direction of the paper is the width direction (the second direction perpendicular to the first direction), the front side of the paper is the width direction side (the second direction side), and the deep side of the paper surface is the other side in the width direction (the second direction). The other side). The upper and lower directions of the paper are the up-down direction (the third direction orthogonal to the first and second directions, the thickness direction), the upper side of the paper...

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Abstract

The resistance measuring device is a resistance measuring device for measuring the sheet resistance of a conductive film that is long in one direction, and the resistance measuring device has two probes that can be used without contacting the conductive film. The conductive film is disposed between the two detectors to face each other with an interval therebetween; a scanning unit that scans the two detectors in a cross direction intersecting with one direction; and an arithmetic unit that is based on the two detectors The voltage measured by each detector is used to calculate the sheet resistance of the conductive film. The arithmetic unit has a memory for storing a reference voltage measured by scanning the two detectors in the intersecting direction without interposing the conductive film between the two detectors. The arithmetic unit corrects the actual voltage measured by interposing the conductive film between the two detectors and scanning the two detectors in the cross direction based on the reference voltage.

Description

technical field [0001] The present invention relates to a resistance measuring apparatus, a film manufacturing apparatus, and a method for manufacturing a conductive film. Background technique [0002] Conventionally, a conductive film is produced by laminating a conductive film on a base film by a roll-to-roll method. Since the surface resistance (sheet resistance) of the produced conductive film is required to be in a desired range, it is necessary to measure the surface resistance to find out the quality of the surface resistance. As the method, there is known a method of measuring the surface resistance of the conductive film using a non-contact resistance measuring device before winding the conductive film (for example, refer to Patent Document 1). [0003] The non-contact surface resistance measuring device of Patent Document 1 includes an eddy current sensor composed of an eddy current generating portion and an eddy current detecting portion, and a separation distanc...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R27/02C23C14/34C23C14/54C23C14/56G01R35/00
CPCG01R35/00G01R27/08C23C14/52C23C14/545C23C14/562C23C14/205G01R1/07392C23C14/34C23C14/54C23C14/56G01R31/002
Inventor 森光大树
Owner NITTO DENKO CORP
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