Edge polishing device and polishing method
A polishing device and edge technology, which is applied in the direction of surface polishing machine tools, grinding/polishing equipment, metal processing equipment, etc., can solve the problems of poor wafer edge, reduced friction, and reduced removal rate, and achieves constant removal rate , to avoid the effect of insufficient removal
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[0030] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the following will clearly and completely describe the technical solutions of the embodiments of the present invention in conjunction with the drawings of the embodiments of the present invention. Apparently, the described embodiments are some, not all, embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention belong to the protection scope of the present invention.
[0031] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying...
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