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Processing method of micro-convex lens array structure

A technology of micro-convex lens array and processing method, which is applied to the photoplate process of lens and pattern surface, and the original for optical mechanical processing, etc., which can solve the problems of complex processing process, waste of convex lens materials, and low processing efficiency.

Active Publication Date: 2022-05-27
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The invention discloses a processing method of a micro-convex lens array structure to solve the problems of material waste, complicated processing and low processing efficiency in the current processing of convex lenses.

Method used

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  • Processing method of micro-convex lens array structure
  • Processing method of micro-convex lens array structure
  • Processing method of micro-convex lens array structure

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Embodiment Construction

[0019] In order to make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the specific embodiments of the present invention and the corresponding drawings. Obviously, the described embodiments are only some, but not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0020] The technical solutions disclosed by the various embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0021] like figure 1 and figure 2 As shown, an embodiment of the present invention discloses a method for processing a micro-convex lens array structure, and the processing method includes:

[...

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Abstract

The invention discloses a processing method of a micro-convex lens array structure, comprising: forming a patterned mask droplet on the surface of a lens substrate, wherein the mask droplet includes a hydrophilic mask material; curing the mask film droplets to form a patterned mask layer; etch the mask layer and the lens substrate to form a micro-convex lens array structure, wherein the etched rate of the lens substrate is greater than that of the mask layer The etching rate is , and each micro-convex lens in the micro-convex lens array structure has an arc-shaped convex surface. The processing method of the micro-convex lens array structure disclosed in the above technical solution can solve the problems of material waste, complicated processing and low processing efficiency in the current convex lens processing.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing, in particular to a processing method of a micro-convex lens array structure. Background technique [0002] In the semiconductor field, a lens is a commonly used tool, and since the size of the semiconductor is usually small, the size of the lens used in the semiconductor processing process is also usually small. At present, in the process of processing convex lenses, a pre-prepared nano-imprint mold is usually used to copy the lens structure pattern of the required shape and size onto the embossing glue, and then the substrate is etched by etching to make the When the selection ratio of the embossing glue and the substrate is close to 1:1, a three-dimensional lens structure corresponding to the lens structure pattern can be formed on the substrate. [0003] However, in the process of using the above technical solution to process the lens, it is necessary to cover the substrate w...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B3/00G03F1/80G03F7/00
CPCG02B3/0012G03F1/80G03F7/0002
Inventor 林源为袁仁志
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD