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Photo-thermal reflection microscopic thermal imaging device and drift correction method

A microscopic thermal imaging and drift correction technology, which is applied in microscopes, measuring devices, optics, etc., can solve problems such as complex operations and achieve the effect of suppressing the drift of light source intensity

Active Publication Date: 2020-12-18
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In view of this, an embodiment of the present invention provides a photothermal reflection microthermographic imaging device and a drift correction method, aiming to solve the problem in the prior art that modulation is required to be applied to the measured object and the operation is complicated when suppressing the drift

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  • Photo-thermal reflection microscopic thermal imaging device and drift correction method
  • Photo-thermal reflection microscopic thermal imaging device and drift correction method
  • Photo-thermal reflection microscopic thermal imaging device and drift correction method

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Embodiment Construction

[0042] In the following description, specific details such as specific system structures and technologies are presented for the purpose of illustration rather than limitation, so as to thoroughly understand the embodiments of the present invention. It will be apparent, however, to one skilled in the art that the invention may be practiced in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.

[0043] In order to illustrate the technical solutions of the present invention, specific examples are used below to illustrate.

[0044] An embodiment of the present invention provides a photothermal reflection microthermography device, such as figure 1 As shown, it includes: adding a modulation plate 1 and a light adjustment device 2 to the original photothermal reflection microthermography devi...

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Abstract

The invention is suitable for the field of image processing and the field of microscopic imaging, and provides a photo-thermal reflection microscopic thermal imaging device and a drift correction method. The device comprises a dimming sheet and a dimming device which are additionally arranged on an original photo-thermal reflection microscopic thermal imaging device; wherein the modulation sheet is arranged between a scattering sheet and a collimating lens in the original photo-thermal reflection microscopic thermal imaging device, and is positioned on the focal plane of the collimating lens;the dimming device is arranged on a light path of the original photo-thermal reflection microscopic thermal imaging device and is used for enabling the illumination light modulated by the dimming sheet to be directly imaged on an image plane without passing through the surface of the tested sample. Due to the fact that the dimming sheet and the dimming device are additionally arranged in the photo-thermal reflection microscopic thermal imaging device, the influence of light source intensity drifting and camera responsivity drifting on errors of collected images can be effectively restrained; therefore, temperature measurement of a static target can be achieved without modulation on the temperature of a measured object.

Description

technical field [0001] The invention belongs to the field of image processing and microscopic imaging, and in particular relates to a photothermal reflection microthermographic imaging device and a drift correction method. Background technique [0002] Photothermal reflection temperature measurement technology is a non-contact temperature measurement technology based on the phenomenon of photothermal reflection. The basic feature of photothermal reflection phenomenon is that the reflectivity of an object will change with the temperature of the object. When measuring temperature based on photothermal reflection, the illumination system of an optical microscope is used to provide probe light, a high-performance camera is used to record microscopic imaging, and the output camera readings are used as measurement values. However, during the temperature measurement process, the intensity of the detection light will vary randomly, and the responsivity of the camera will also change...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K11/00G02B21/36
CPCG01K11/00G02B21/365G02B21/361
Inventor 刘岩梁法国丁立强徐森锋范雅洁
Owner THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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