On-chip calibrator model and method of parameter determination in on-chip calibrator model

A technology for determining parameters and calibrating models, which is applied in the field of on-chip calibration part models and parameter determination in on-chip calibration part models, can solve problems such as calibration and test accuracy reduction, achieve calibration and measurement errors, and improve test accuracy Effect
CN112098791AActive Publication Date: 2020-12-18THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
Publication Date
2020-12-18

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Abstract

The invention is applicable to the technical field of measurement of microwave characteristics of primary semiconductor devices, and provides an on-chip calibrator model and a method of parameter determination in the on-chip calibrator model. The on-chip calibration model comprises a resistor for representing crosstalk of an on-chip calibrator and a capacitor for representing crosstalk of the on-chip calibrator; the resistor representing crosstalk of the on-chip calibrator is connected in series with a circuit formed by elements in an original calibrator model, and one end of the capacitor representing crosstalk of the on-chip calibrator is connected between the resistor representing crosstalk of the on-chip calibrator and one end of the circuit formed by elements in the original calibrator model. And the other end of the capacitor representing crosstalk of the on-chip calibrator is connected to the other end of the circuit formed by the elements in the original calibrator model. According to the on-chip calibration model provided by the embodiment of the invention, the on-chip S parameter test accuracy of the terahertz frequency band can be improved.
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Description

technical field

[0001] The invention belongs to the technical field of microwave characteristic measurement of wafer-level semiconductor devices, and in particular relates to an on-chip calibration model and a method for determining parameters in the on-chip calibration model. Background technique

[0002] "On-chip S-parameter test system" is widely used in the microelectronics industry. Before use, it is necessary to perform vector calibration on the on-chip S-parameter test system with the on-chip calibration kit. The accuracy of the calibration depends on the accuracy of the definition of the on-chip calibration kit. Different types of calibration kits (such as open calibration kits, short calibration kits, load calibration kits, and thru calibration kits) have different values ​​for the lumped parameters in the measurement model. Resistance, inductance, capacitance and DC resistance. How to obtain the accurate magnitude of each lumped parameter in the measurement model...

Claims

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