External hanging type cavity for cleaning arm stained with organic solution and cleaning method

Abstract

The invention discloses an external hanging type cavity for cleaning an arm stained with an organic solution and a cleaning method. The externally-hung cavity comprises a pipeline for spraying isopropanol on the front face, a pipeline for spraying deionized water on the front face, a pipeline for spraying the isopropanol on the back face, a pipeline for spraying the deionized water on the back face, a hot nitrogen drying pipeline, a cavity door and a control module, wherein the pipeline for spraying the isopropanol on the front face and the pipeline for spraying the deionized water on the front face respectively spray the isopropanol and the deionized water on the front side of the arm; the pipeline for spraying the isopropanol on the back face and the pipeline for spraying the deionized water on the back face respectively spray the isopropanol and the deionized water on the back face of the arm; the hot nitrogen drying pipeline sprays hot nitrogen to the arm to dry the arm; the control module drives the arm to be cleaned to extend into the cavity door; and the control module controls valves of all the pipelines respectively. According to the external hanging type cavity for cleaning the arm stained with the organic solution and the cleaning method, cleaning and drying of the arm are achieved, and the inherent defects of organic wet method semiconductor automation equipment areovercome.

Description

technical field [0001] The invention belongs to semiconductor automation equipment, in particular to organic wet semiconductor automation equipment transported by grooved arms. Background technique [0002] Organic wet process semiconductor equipment is mainly used to soak wafers with glue. Some wafers have through holes that cannot be used with vacuum arms, only physical groove arms. Such as figure 1 As shown, in the actual use of the organic wet-process semiconductor automation equipment transported by the groove arm, the arm is easily contaminated with viscous organic liquid, which leads to unstable transmission of the equipment and wastes the effective operation time of the equipment. Contents of the invention [0003] In order to solve the technical problems mentioned in the above-mentioned background technology, the present invention proposes an external hanging cavity and a cleaning method for cleaning an arm stained with an organic solution. [0004] In order to...

AI Technical Summary

Problems solved by technology

Some wafers with through holes cannot use the vacuum arm, only the physical groove arm

like figure 1 As shown, the organic wet-process semiconductor automation equipment transported by the groove arm is easy to be stained with viscous organic liquid in actual use, which will lead to unstable transmission of the equipment and waste the effective operation time of the equipment.

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