Apparatus and method for clamping and picking up silicon wafers stored in wafer cassettes, and silicon wafer transfer equipment

A silicon wafer box and silicon wafer technology, applied in the direction of conveyor objects, transportation and packaging, electrical components, etc., can solve the problem of simultaneous or one-time transmission, four silicon wafers cannot be transmitted at the same time or one-time transmission, equipment 10A work efficiency reduction and other issues
CN112151432BActive Publication Date: 2021-03-05XIAN ESWIN SILICON WAFER TECH CO LTD
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
XIAN ESWIN SILICON WAFER TECH CO LTD
Publication Date
2021-03-05

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Abstract

The embodiment of the present invention discloses a device, method and silicon wafer conveying equipment for clamping and picking up silicon wafers stored in a silicon wafer box. The device may include: a drive shaft capable of rotating around its own longitudinal axis; A plurality of gripping arms on the drive shaft extending in a direction perpendicular to the longitudinal axis of the drive shaft so as to reach into the wafer cassette and hold the wafer as the drive shaft moves close to the cassette. The clips are clamped; the buckle mechanism is arranged between each clamping arm and the drive shaft. The buckle mechanism can be switched between the locked state and the unlocked state. In the locked state, the drive shaft drives the clamping arm so that When the drive shaft rotates, the clamping arm rotates together with the drive shaft. In an unlocked state, the drive shaft cannot drive the clamping arm so that the clamping arm remains stationary when the drive shaft rotates.
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Description

technical field

[0001] The invention relates to the technical field of semiconductor production, in particular to a device, method and silicon wafer conveying equipment for clamping and picking silicon wafers stored in a silicon wafer box. Background technique

[0002] Multi-arm wafer transfer equipment for transferring wafers stored in wafer cassettes is known in the prior art, wherein the wafer cassette typically has a plurality of slots arranged in a stacked manner within the wafer cassette Each slot is suitable for placing a single silicon wafer, while the multi-arm silicon wafer transfer device has a plurality of gripping arms, which can simultaneously or at one time grip the slots corresponding to the plurality of gripping arms The corresponding plurality of silicon wafers, and the plurality of gripping arms can move together with the robot arm of the device to transfer the gripped silicon wafers to the target position. A multi-arm wafer transfer machine can maximize ...

Claims

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