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Gas detection device and manufacturing method thereof

A gas detection, detection and control technology, applied in the direction of material resistance, to achieve the effect of increasing specificity and solving poor process compatibility

Pending Publication Date: 2022-02-22
THE HONG KONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0014] It is an object of the present invention to propose a solution to solve or at least alleviate at least some of the above-mentioned problems

Method used

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  • Gas detection device and manufacturing method thereof
  • Gas detection device and manufacturing method thereof
  • Gas detection device and manufacturing method thereof

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Embodiment Construction

[0052] In order to make the above and other features and advantages of the present invention clearer, the present invention will be further described below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments given herein are for the purpose of explaining to those skilled in the art, and are only exemplary rather than restrictive. Features shown in the drawings are not necessarily drawn to scale.

[0053] The features described herein may be embodied in different forms and should not be construed as limited to the examples described herein. Rather, the embodiments described herein are provided merely to illustrate some of the many possible ways of implementing the devices and / or systems described herein that will be apparent after understanding the disclosure of the present application.

[0054] As used herein, the term "and / or" includes any one of the associated listed items and any combination of any two or mor...

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Abstract

The invention provides a gas detection device and a manufacturing method thereof. The gas detection device comprises a plurality of detection units and interconnection control lines which are formed on the same substrate, the plurality of detection units are arranged in rows and columns to form an array, and each detection unit comprises a micro hot plate and a circuit unit which is associated with the micro hot plate and comprises a transistor. Each micro hot plate includes: a suspended film supported over a substrate; a heater arranged on the suspended film or embedded in the suspended film; and a pair of measuring electrodes arranged above the heater. The interconnection control lines are arranged to enable the detection units in each row to share the same selection interconnection lines and the detection units in each column to share the same signal interconnection lines, wherein the selection interconnection lines used for different rows of the array are different from one another, and the signal interconnection lines used for different columns of the array are different from one another. According to the invention, addressing and control on each micro hot plate in the array can be realized by reducing devices and connecting lines, and two or more micro hot plates can be independently and simultaneously operated.

Description

technical field [0001] The present invention generally relates to the field of gas detection, and more specifically relates to a gas detection device integrated on a substrate including a micro-hot plate array and a transistor circuit and a method for manufacturing the gas detection device. Background technique [0002] Gas sensors for detecting the composition and component concentrations of mixed gases play an important role in industrial production and environmental monitoring. Gas sensors based on metal oxide semiconductor functional materials have the advantages of stable physical and chemical properties, simple and low-cost manufacturing process, and short response and recovery times. When a certain metal oxide semiconductor (such as tin oxide (quaternary) and zinc oxide (divalent)) is exposed to the target gas, the gaseous species adsorbed or absorbed by the metal oxide semiconductor will cause a redox reaction and change the metal oxide The concentration of charge c...

Claims

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Application Information

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IPC IPC(8): G01N27/18
CPCG01N27/18
Inventor 刘宗王文Y·克夫兰
Owner THE HONG KONG UNIV OF SCI & TECH
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