Filter circuit of ion source driving power supply and filter parameter detection method and device thereof

A filter circuit and drive power technology, applied in the field of ion sources, can solve the problems of high-frequency irregular oscillation, unstable output voltage, damage to the drive power, etc., to filter out high-frequency interference, ensure output voltage, and avoid damage to the power supply Effect

Pending Publication Date: 2020-12-29
ZHONGSHAN IBD TECH CO LTD +1
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Problems solved by technology

However, due to the influence of vacuum degree, gas volume, gas type, ionization degree and neutralizer power supply, etc., the resistance of the ion source will change at high frequency, and the output current of the driving power will also change at high frequency. The change produces high-frequency interference with large energy. At the same time, the driving power supply adjusts the

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  • Filter circuit of ion source driving power supply and filter parameter detection method and device thereof
  • Filter circuit of ion source driving power supply and filter parameter detection method and device thereof
  • Filter circuit of ion source driving power supply and filter parameter detection method and device thereof

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[0049]The embodiments of the present application are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals indicate the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the drawings are exemplary, and are only used to explain the present application, and cannot be construed as limiting the present application.

[0050]Those skilled in the art can understand that, unless specifically stated otherwise, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the term "comprising" used in the specification of this application refers to the presence of the described features, integers, steps, and operations, but does not exclude the presence or addition of one or more other features, integers, steps, and operations.

[0051]Those skilled in the art can understand t...

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Abstract

The invention relates to a filter circuit of an ion source driving power supply and a filter parameter detection method and device thereof, and the filter circuit of the ion source driving power supply is an LC filter circuit, is connected in series between the ion source driving power supply and an ion source load, and comprises inductors connected in series and filter capacitors connected in parallel; the filter circuit is used for suppressing high-frequency oscillation of the real-time current waveform output by the ion source driving power supply and filtering out a high-frequency oscillation interference signal in the real-time current waveform. According to the technical scheme provided by the invention, the LC filter circuit of the high-frequency filter element, the series inductorand the parallel filter capacitor are adopted, so when the ion source driving power supply outputs power, the filter circuit can ensure that the ion source driving power supply outputs smooth direct-current voltage, high-frequency interference caused by instability in ion source load is filtered out, and the power supply is prevented from being damaged.

Description

technical field [0001] The present application relates to the technical field of ion sources. Specifically, the present application relates to a filter circuit of an ion source drive power supply, a method and a device for detecting filter parameters of the filter circuit of an ion source drive power supply. Background technique [0002] Ion source is an applied science and technology with wide application, many types, many sciences involved, strong technological process and very rapid development. Taking the Hall ion source as an example, as a very common, simple and durable ion source type, it is mostly used in the field of thin film deposition and coating of optical components. [0003] The ion source is mainly powered by the ion source drive power supply, which applies voltage to the ion source load to ionize the gas to generate ionized ions. However, due to the influence of vacuum degree, gas volume, gas type, ionization degree and neutralizer power supply, etc., the r...

Claims

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Application Information

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IPC IPC(8): H03H7/01G01R27/28G01R27/26
CPCH03H7/0115H03H7/0153G01R27/28G01R27/26
Inventor 曾文华刘伟基冀鸣刘运鸿易洪波赵刚
Owner ZHONGSHAN IBD TECH CO LTD
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