187 results about "High frequency oscillation" patented technology

The invention relates to the technical field of electromagnetic relay control, in particular to an electromagnetic relay control system, which comprises a relay execution unit, a contact state monitoring unit and an intelligent viscosity elimination control unit, and is characterized in that the contact state monitoring unit acquires quantum tunneling effect impedance spectroscopy and acoustic emission energy entropy change signals in real time; the intelligent viscosity-eliminating control unit analyzes signals through a fusion welding risk multi-dimensional evaluator, triggers a three-stage control sequence, firstly starts a magnetostriction high-frequency oscillator to inject an inverted eddy current array, activates a hysteresis loop restorer to apply a gradient demagnetization potential field if the fusion welding risk multi-dimensional evaluator is not recovered, and finally, recovers the fusion welding risk multi-dimensional evaluator; when an acoustic emission signal is abnormal, a chaotic encryption message is generated through the fault feature topology generator and is linked with the magnetic solitary wave breaking device, ultrasonic frequency mechanical energy can be captured and converted into regenerative current, an adhesion evolution path is reconstructed after diagnosis, the problems of contact adhesion risk identification lagging and lack of multi-physics field cooperative control in the prior art are solved, and the reliability of the contact adhesion risk identification is improved. And the adhesion early warning success rate and the removal efficiency are improved.

The invention discloses a current source type LCCL double-frequency resonance system and a parameter matching method thereof, which are suitable for synchronous double-frequency induction quenching of complex workpieces such as gears. The system is composed of two current type resonant inverters working at a low frequency and a high frequency respectively and a dual-frequency LCCL resonant cavity, and dual-frequency current superposition is realized through parallel output. The double-frequency LCCL resonant cavity has two parallel resonance points, a mode based on simplified topology is adopted to simplify parameter design, and meanwhile design errors are maintained at a low level. A power matching coefficient is introduced, the ratio of high-frequency output power to low-frequency output power is adjusted by adjusting the value of the power matching coefficient, and the problem of double-frequency power unbalance caused by frequency variation characteristics of load equivalent resistance and the like is solved. The superposed double-frequency current forms a low-frequency envelope embedded high-frequency oscillation composite waveform on the induction heating coil, cooperative control of tooth root deep quenching (low frequency) and tooth surface hard quenching (high frequency) is achieved, and the method has the advantages of being simple in parameter design, high in power decoupling performance, high in operation stability and the like.

The invention relates to a DRU-MMC receiving end high-frequency oscillation suppression method and device. The method comprises the following steps: detecting an alternating current system side impedance and detecting whether an alternating current system side voltage has an oscillation trend or not; if it is judged that oscillation occurs, a reverse damping voltage needed to be output theoretically is calculated according to the alternating current system side impedance and serves as a voltage outer ring instruction value; tracking the generated voltage outer loop instruction value and outputting a modulation signal; driving pulses of all bridge arms of the power electronic energy converter are generated according to the modulation signals, so that the series converter is controlled to output active damping to counteract damping on the alternating current system side; according to the detected alternating current system side voltage, the positive sequence voltage phase and the angular frequency of the alternating current system side grid connection point are extracted, the positive sequence voltage phase is used for modulating module phase input, and the angular frequency is used for calculating the reverse damping voltage needed to be output theoretically. Impedance remodeling can be carried out according to the possible oscillation frequency, the positive damping characteristic is presented, and therefore the good oscillation suppression effect is achieved.

The invention relates to a DC power transmission system oscillation suppression method based on a matrix passivity theory. The method comprises the following steps: firstly, establishing a converter admittance matrix under a frequency coupling effect; then, constructing a stability criterion of the direct-current power transmission system based on the admittance matrix of the converter in combination with a matrix passivity theory; and finally, based on the stability criterion of the direct-current power transmission system, adding active damping and passive damping, adjusting corresponding parameters, and suppressing medium-high frequency oscillation of the direct-current power transmission system. The method can solve the problem of dependence on power grid side impedance modeling, constructs the stability criterion of the DC power transmission system by directly analyzing the admittance matrix characteristics of the converter, adapts to the complex situation when the AC grid side operation condition changes, and can completely suppress the medium-high frequency oscillation of the DC power transmission system. An unstable interval of a direct current system is transferred to a high frequency band through active damping, strict stability of the direct current power transmission system in middle and high frequency bands is achieved through passive damping, and the strategy cost is reduced.

The embodiment of the invention discloses a negative damping elimination method, device and equipment based on SVG and a storage medium, and the method comprises the steps: carrying out the impedance scanning of the SVG in a range of 1-3000Hz, obtaining the positive-sequence impedance and negative-sequence impedance of the SVG under different operation conditions, and determining the leading operation condition of the SVG impedance; determining the positive sequence equivalent impedance and the negative sequence equivalent impedance of the SVG grid-connected point according to the positive sequence dominant impedance and the negative sequence dominant impedance of the SVG under the dominant operation condition; determining the value ranges of the positive sequence damping correction value and the negative sequence damping correction value of the SVG; the maximum value of the intersection of the two value ranges is determined as SVG compensation damping, and the SVG compensation damping is merged into an SVG grid-connected point port; according to the scheme, only two unknown parameters including the positive sequence damping correction value and the negative sequence damping correction value are involved, the parameters can be calculated based on an analytic formula pure algebraic equation, the calculation mode is simple, the port impedance characteristic negative damping of the SVG in the full frequency band within the range of 1-3000 Hz can be eliminated, and the problem of high-frequency oscillation is thoroughly solved.

The invention discloses a servo connecting rod high-frequency swing mechanism, which belongs to the technical field of bearing processing equipment, and comprises an adjusting piece and a swing head which are arranged on the same side outside a bracket, one end of the transmission shaft is connected with the adjusting piece; one end of the swinging shaft is connected with the swinging head; the two ends of the connecting rod are eccentrically arranged relative to the transmission shaft and the swing shaft respectively and rotationally connected with the adjusting piece and the swing head respectively; the adjusting piece is used for adjusting the eccentric distance of the connecting rod relative to the transmission shaft in the radial direction. The belt link is omitted through direct-drive transmission, the servo motor coupler directly drives the transmission shaft, power loss is reduced, and the swing frequency and stability are improved.

The invention provides a rapid resin curing device and a using method thereof, and belongs to the technical field of material molding, the rapid resin curing device comprises a lower die, an upper die, a first insulating part and a press machine which are sequentially arranged on a workbench from bottom to top; the lower die and the upper die are both connected with the high-frequency oscillating circuit device; and the lower mold and the upper mold are connected with a mold temperature controller through a mold temperature controller pipeline. The high-frequency electromagnetic field effect is superposed for resin curing while heating and pressurizing, the resin curing efficiency is improved, the occupied time of curing equipment and a mold is greatly shortened, and large-scale curing production of resin products is facilitated.

The invention discloses an FCE diode and a manufacturing method thereof. The cathode metal is provided with a trench isolation region, cathode N + regions and cathode P + regions, the cathode N + regions and the cathode P + regions are transversely and alternately arranged, the trench isolation region isolates the cathode N + regions from the cathode P + regions, and the thickness of the trench isolation region exceeds 2 microns of the cathode N + regions and the cathode P + regions And then a plasma storage region, a field stop region, a base region, an anode P region and anode metal are sequentially arranged. The thickened trench isolation region is indispensable for improving the current density uniformity near the cathode, and can weaken low-frequency oscillation and reduce conduction voltage drop; the thickened plasma storage region can weaken low-frequency oscillation, improve the current density uniformity near the anode and reduce reverse recovery energy under severe or extreme conditions; the two measures can also ensure that the base region is greatly thinned on the premise of enlarging the safe working region, so that the loss is reduced. By optimizing and compromising the structural parameters of each area, the FCE diode can achieve the beneficial effects of self-clamping, low loss, uniform current density, no high-frequency oscillation, slight low-frequency oscillation and wide safe working area.

The invention discloses a random question number generator and method suitable for a question and answer mode watchdog, and belongs to the technical field of integrated circuit safety. Comprising an on-chip high-frequency oscillation source, an enabling controller, a low-power-consumption controller, a pseudo-random number generator and a random code hopping device. According to the method, an external dog feeding signal is used for triggering, a non-reproducible hopping code value is generated by using different sources of clock sources and physical deviation of signal transmission, a pseudo-random number generator is controlled to operate within a random duration, and a low-power-consumption state is entered after a final random problem number is output and latched. Through hardware-level entropy source enhancement and dynamic power consumption management, the predictable potential safety hazard of the traditional pseudo-random number sequence is fundamentally solved, and the balance of high randomness, high attack resistance and low power consumption is realized at low cost.

This invention discloses a method for locating epileptogenic zones based on high-frequency oscillations and connectivity, comprising the following steps: 1. Acquiring SEEG data and selecting representative channels; 2. Filtering to acquire 54-200Hz signals and selecting baseline and target data; 3. Acquiring normalized high-frequency energy; 4. Calculating time and energy coefficients to obtain a high-frequency epileptogenicity index; 5. Filtering to acquire 12-45Hz signals; 6. Calculating nonlinear regression analysis; 7. Calculating total intensity; 8. Defining and calculating the connectivity high-frequency epileptogenicity index and evaluating performance. This invention can accurately locate epileptogenic zones in patients with different seizure patterns, and has potential application value in epilepsy treatment.

The utility model relates to the technical field of cubilose raw material treatment, and discloses a raw material treatment device for instant cubilose production, which comprises a cleaning machine, the outer wall of the cleaning machine is fixedly connected with a controller, the inside of the cleaning machine is fixedly connected with an ultrasonic oscillator, and the inner wall of the cleaning machine is fixedly connected with a mounting seat. A mounting assembly is arranged on the inner wall of the mounting base, a drainage assembly is arranged on one side in the cleaning machine, the mounting assembly comprises a connecting base, the outer wall of the connecting base is slidably connected to the inner wall of the mounting base, a button is slidably connected to one side of the inner wall of the connecting base, a spring is arranged in the button, and one end of the button is fixedly connected with a sliding rod. According to the bird's nest cleaning machine, a high-frequency oscillation signal is generated through ultrasonic oscillation, so that cleaning liquid in the cleaning machine generates a cavitation effect, impurities hidden in the cleaning liquid can be shaken off, it is ensured that all corners of bird's nest raw materials can be cleaned, and cleaning thoroughness is greatly improved.

The present invention comprises: a high-frequency oscillator that transmits high-frequency energy and includes a control unit; a high-frequency connecting line connected to the high-frequency oscillator; and a high-frequency transmission pad connected to the other end of the high-frequency connecting line and attached to the curve of facial skin in close contact with it, wherein the high-frequency transmission pad is configured such that an adhesive pad and a bipolar pad are integrated or separate. This invention relates to a non-invasive automatic facial lifting device using high-frequency energy that adheres closely to the curves of the face to be treated, thereby enabling uniform delivery of high-frequency energy to the skin, allowing for effective treatment without separate operation, minimizing the risk of excessive thermal damage to specific areas of the skin, resolving issues such as pain, scarring, and infection associated with existing invasive technologies, enhancing user convenience and safety through an automated control system and customized settings, and providing uniform treatment effects and reducing treatment time and fatigue by monitoring skin temperature in real time and delivering high-frequency energy according to set output, time, and patterns.

The invention relates to a core temperature sensor (CTS) for use with a microwave cooking appliance that generates microwaves within a specific microwave frequency band for cooking food, wherein the core temperature sensor (CTS) comprises: at least one temperature sensor (TS), an antenna (ANT), a high-frequency oscillator (1) whose output signal can be fed into the antenna (ANT) and whose signal frequency lies outside the microwave frequency of the microwave cooking appliance, a modulation device (OOK) configured to generate a pulse train from the output signal of the high-frequency oscillator (1) by means of amplitude modulation, which corresponds to digital temperature data generated by means of the at least one temperature sensor (TS), and an electrical energy storage device (BAT) for supplying electrically operated components (MCU, TS, OSZ-AMP) of the core temperature sensor (CTS).The invention also relates to a system comprising a core temperature sensor and a cooking device, comprising a receiver for receiving electromagnetic waves emitted by the core temperature sensor and a control device configured to operate the cooking device based on information contained in the received electromagnetic waves.

The invention relates to the field of semiconductor power devices, and discloses an elastic assembly for modulating high-frequency oscillation characteristics, the elastic assembly comprises a short circuit board, a disc spring group, a transmitting polar plate and a sleeve, the surface of the transmitting polar plate is provided with a round hole, the round hole is used for installing the disc spring group, the disc spring group is installed between the short circuit board and the transmitting polar plate, and the sleeve is sleeved on the short circuit board. The sleeve is arranged at one end of the connecting position of the disc spring sets and the short-circuit board in a sleeving mode, the multiple disc spring sets are in short circuit through the short-circuit board, the chip path is optimized, the parasitic path is remarkably shortened, the parasitic inductance is reduced, and therefore high-frequency oscillation is effectively restrained. The clamping grooves and the disc spring sets are consistent in number and are designed in a staggered mode, the assembling accuracy and efficiency are improved, the space is reasonably utilized, and the stability of the disc spring sets is guaranteed. In addition, contact between the flow deflectors is avoided through staggered installation, and mutual influence is reduced.

This invention discloses a method for achieving phase-frequency synchronization based on a coupled neuron oscillator system. First, a cross-frequency nonlinear coupling model is constructed by establishing a two-connection structure based on exogenous input and local interaction in the Poincaré model. By introducing nonlinear coupling, phase-frequency synchronization of the coupled neuron oscillators is achieved. Spectral analysis is then used to determine the effect of the coupling strength between low-frequency and high-frequency neurons on phase-frequency synchronization. Theoretical analysis is then used to determine the influence of the low-frequency oscillation phase on the high-frequency oscillation frequency and its mechanism.

The invention provides a gallium nitride power device packaging parasitic parameter degradation monitoring method. The method comprises the following steps: establishing a high-frequency RLC oscillation model of a gallium nitride power device comprising packaging parasitic parameters under a high-frequency switching condition; judging whether the oscillation amplitude of the switch transient current change rate measurement waveform is reduced compared with the switch transient current change rate reference waveform or not; determining the correlation between the packaging parasitic parameter and the switching transient current change rate oscillation amplitude; predicting whether the packaging of the gallium nitride power device is degraded or not; the change of the change rate of the transient current of the switch is reflected through packaging parasitism, and whether the packaging of the gallium nitride power device is degraded or not is monitored by using packaging parasitism parameters, so that an early signal of the packaging degradation of the device can be effectively identified, and an early tiny packaging degradation sign can be captured; and the accuracy of packaging degradation monitoring is high.

The invention discloses a ship propeller underwater cleaning robot and a cleaning method, and relates to the technical field of ship cleaning. The cleaning and recycling mechanism comprises a sweeping and recycling device and an ultrasonic cleaning device which are connected to the robot body; the ultrasonic cleaning device is used for beating dirt on the surface of the propeller through high-frequency oscillation signals to loosen the dirt; the sweeping and recycling device comprises a mechanical arm, a scrubbing assembly and a recycling and filtering assembly. The scrubbing assembly is connected to the tail end of the mechanical arm and used for cleaning dirt on the propeller. The recycling and filtering assembly is connected to the scrubbing assembly and can suck dirt for collection and filter water flow and then return the water flow to a water source; the power system comprises a propeller assembly, and the propeller assembly is connected to the robot body and used for propelling the robot body to reach the cleaning position; the posture detection system comprises a main controller, an IMU chip sensor, a camera and a laser range finder which are connected to the robot body.

An electrically heatable aerosol-generating system is provided, including an aerosol-generating device and a cartridge configured to be used with the aerosol-generating device, the aerosol-generating device including: a device housing, an inductor coil, and a power supply connected to the inductor coil and configured to provide a high-frequency oscillating current to the inductor coil; and the cartridge including: a cartridge housing configured to engage the device housing and containing an aerosol-forming substrate, the cartridge housing having an external surface surrounding the aerosol-forming substrate, and a fluid-permeable susceptor element. A cartridge for an electrically heatable aerosol-generating system is also provided.

The invention relates to the technical field of combustors, in particular to a TPMS porous medium combustor and a two-way air inlet using method thereof.The TPMS porous medium combustor comprises a combustor body and a TPMS porous medium heat accumulator filled in the combustor body, air inlet pipes which are symmetrically arranged are fixed to the two sides of the combustor body, and the ends of the air inlet pipes are fixedly communicated with premixing pipes; the air supply pipes are symmetrically fixed to the side wall of the premixing pipe, and an airflow adjusting assembly is arranged on the premixing pipe and used for adjusting the flow speed of airflow pumped by the air supply pipes; the partition plate is fixed in the air inlet pipe, and the partition plate divides the air inlet pipe into a buffer chamber and a conveying chamber; the conveying pipe is fixed to the air inlet pipe and communicates with the conveying cavity and the combustor, and a communicating assembly is arranged in the air inlet pipe; and the buffer pushing mechanism is arranged in the air inlet pipe, and when the air pressure in the buffer cavity is gradually increased, the conveying pipe can be controlled to be gradually conducted through a conduction assembly, so that high-frequency oscillation caused by air pressure fluctuation is avoided.

The invention discloses a cooperative sensing method for high-frequency oscillation suppression and gate-oxide state of a power device gate, which comprises the following steps of: sleeving an outer resonator coil on a driving side of the power device gate in a non-contact manner, connecting the outer resonator coil with a sensing loop during starting, injecting a pulse excitation signal into the power device gate by the driving side, and starting the sensing loop. Acquiring a gate oscillation current through a sensing loop, and evaluating the gate oxide state of the power device by taking the amplitude of the gate oscillation current as a gate oxide aging sensitive parameter; based on the resonance matching relation, pre-configuring suppression loop parameters; then switching an outer resonator coil to be connected with a suppression loop, and enabling the power device to work and run in a state of suppressing the grid oscillation current; according to the invention, cooperative control of gate-oxide degradation state and suppression loop parameter adjustment is constructed, a self-adaptive efficient grid oscillation current suppression effect is realized according to the gate-oxide health state, and the method is flexible, reliable and universally applicable to existing power devices.

The invention discloses a high-frequency oscillation suppression method and system for a flexible direct-current power transmission system, and belongs to the field of high-frequency oscillation suppression of a power system, and the method comprises the steps: adding a Gaussian white noise signal in current control of the flexible direct-current power transmission system, and continuously observing the voltage and current of a grid-connected point of the flexible direct-current power transmission system; acquiring the amplification factor of the oscillation signal in the frequency domain and the oscillation stabilization time in the time domain, and judging the current oscillation risk; when the oscillation risk exists, a differential first controller is introduced to compensate a selected current loop feedback signal, a positive torque signal is generated, and parameters of the differential first controller are obtained based on the current oscillation risk level; and performing feedforward compensation on the generated positive torque signal to an output link of a flexible converter in the flexible direct-current power transmission system. The negative damping phenomenon caused by the control delay effect is effectively compensated, and high-frequency oscillation of the flexible direct-current power transmission system is avoided.

The application provides a kind of high-frequency oscillation detection method based on band adaptive anti-noise power system, comprising: installing three-phase high-frequency voltage transformer at resonance sensitive point, selecting data acquisition window width, collecting three-phase voltage data and constructing three-phase voltage tensor mathematical model;Voltage tensor in three-phase voltage tensor mathematical model is decomposed to Tucker to realize voltage denoising;The voltage tensor after denoising is converted into three-phase voltage, and peak detection is carried out using dynamic measure;According to the detected high-frequency oscillation signal and its frequency range, wavelet packet decomposition is carried out on three-phase voltage, so that high-frequency oscillation signal and low-frequency fundamental wave and related harmonic components are separated to the wavelet coefficients of each frequency band;The wavelet coefficients containing oscillation signal are subjected to oscillation signal restoration;The restored oscillation signal is subjected to exponential decomposition using Prony method, and high-frequency oscillation characteristics are obtained.The application can improve the detection accuracy of high-frequency oscillation.

This invention belongs to the field of power automation and discloses a method, system, device, and storage medium for monitoring and alarming broadband oscillations in power grids. It includes acquiring the oscillation monitoring type and oscillation monitoring data from oscillation monitoring points; and obtaining oscillation monitoring alarm results based on the oscillation monitoring data using the oscillation monitoring judgment method corresponding to the oscillation monitoring type. Different oscillation monitoring judgment methods are used for different oscillation monitoring types. For ultra-low frequency or low frequency oscillations, a combination of time-domain analysis, FFT algorithm, and Prony algorithm is used; for subsynchronous oscillations, a combination of time-domain analysis and FFT algorithm is used; and for sub / supersynchronous or medium-high frequency oscillations, a master-slave combined oscillation monitoring judgment method is used. This effectively solves the problem of misanalysis caused by frequency aliasing in data window selection and data analysis resampling using the pure Prony algorithm, and improves alarm efficiency by enhancing the effectiveness of the Prony algorithm calculation.

The application discloses a tobacco cut tobacco variable frequency motor state monitoring method based on a common mode loop and belongs to the motor state monitoring field. In view of the problem that early-stage faults of insulation deterioration of a variable frequency motor are difficult to detect in a high-dust, high-humidity and strong electromagnetic interference environment of a tobacco cut tobacco workshop, the application utilizes the correlation characteristics between a common mode loop signal and a motor insulation state, firstly establishes a common mode loop impedance model considering a common mode inductance of a stator winding, an inter-turn equivalent capacitance and a stray capacitance to ground, and calculates a common mode loop resonance frequency; then high-frequency oscillation loop models and medium-frequency oscillation loop models are respectively constructed to obtain an analytical relationship between a common mode current oscillation frequency and an insulation capacitance; a variational mode decomposition algorithm is adopted to separate multi-frequency oscillation characteristics in the common mode current, and high-frequency and medium-frequency common mode oscillation frequencies are extracted; and through online monitoring of an oscillation frequency drift amount, the deterioration degree of phase terminal insulation and internal insulation to ground of the motor winding is evaluated in real time. The application realizes non-invasive online precise monitoring of early-stage insulation faults of the tobacco cut tobacco variable frequency motor, and effectively reduces the risk of unplanned shutdown of a cut tobacco production line.

This utility model discloses a handheld laser welding device, which includes a metal gun body with an alumina ceramic nozzle and a high-frequency oscillation circuit, a rectifier filter circuit, an electronic switch circuit, and an MCU disposed within the gun body and connected in sequence. The high-frequency oscillation circuit is electrically connected to the metal gun body so that when the alumina ceramic nozzle approaches the metal workpiece, a switch signal is transmitted to the MCU through the high-frequency oscillation circuit, the rectifier filter circuit, and the electronic switch circuit. The MCU is used to turn the gun body on or off according to the switch signal. In this application, since the internal circuit has no electrical connection with the metal workpiece being welded, it has strong anti-interference ability, and the nozzle does not need to contact the workpiece, resulting in a longer service life.

A low noise block-downconverter system (LNB system) includes a local oscillator module having first and second phase locked loop circuitry (PLL circuitry) for downconverting an electrical signal to generate a downconverted signal. The first PLL circuitry receives a low-frequency reference signal that is used with an intermediate-frequency oscillator to generate an intermediate-frequency signal. The second PLL circuitry receives and uses the intermediate-frequency signal in conjunction with a high-frequency oscillator, separate from the intermediate-frequency oscillator, to generate a high-frequency signal. The high-frequency signal is used to downconvert the electrical signal. The signal dynamic range of the first PLL circuitry is higher than the signal dynamic range of the second PLL circuitry, thus achieving improved overall dynamic range for the LNB system. The first PLL circuitry may be a first integrated circuit defining a low phase-noise amplifier. A second integrated circuit may include the second PLL circuitry and the high-frequency oscillator.

The invention discloses a resonance network for suppressing transient recovery voltage of a circuit breaker, and belongs to the technical field of high-voltage alternating-current circuit breaker switching-on and switching-off. The resonance network is composed of a metal oxide arrester and N resonance branches with the same structure. The number N of the resonant branches and the resonant frequencies of the resonant branches are obtained through an electromagnetic transient simulation model; the resonant frequency presents low impedance near the transient recovery voltage fundamental frequency, a shunt and energy consumption path is provided for the high-frequency oscillation current, and active suppression of the rising gradient and the oscillation amplitude of the transient recovery voltage is achieved. The metal oxide lightning arrester is used as backup protection, and clamps the transient recovery voltage peak value when the suppression effect of the resonance branch is insufficient or abnormal. The resonant network can significantly suppress the rise rate and amplitude of transient recovery voltage under a high voltage level in a medium strength recovery critical period, effectively improves the on-off reliability of the vacuum circuit breaker, and has good working condition adaptability and system safety.

The utility model relates to vacuum coating equipment technical field especially is concerned about a kind of device of high-frequency oscillation auxiliary magnetron sputtering preparation DLC film, including vacuum sputtering cavity, vacuum system and gas delivery system, the vacuum system and gas delivery system are communicated with the inner chamber of vacuum sputtering cavity respectively, the inside of vacuum sputtering cavity is equipped with magnetron sputtering assembly, high-frequency oscillation auxiliary assembly and substrate turret assembly, plasma channel is formed between the magnetron sputtering assembly and substrate turret assembly, the high-frequency oscillation auxiliary assembly includes oscillation coil and the high-frequency oscillation power supply of oscillation coil electrical connection, the oscillation coil is set to the region corresponding plasma channel in vacuum sputtering cavity inside, the utility model breaks through the ionization limit of traditional magnetic field by introducing high-frequency oscillation field to strengthen the collision excitation of electron and particle, provides feasible path for preparing high-performance DLC film, and its technical research and development and application have important significance to break through industry bottleneck.