Variable-angle synchronous phase shift interference measurement method for gear tooth surface shape errors

A technology of interferometric measurement and synchronous phase shift, which is applied in the field of optical measurement, can solve the problems of low precision and inability to realize full-field measurement, achieve the effects of large measurement range, increased anti-interference ability, and simplified operation process

Active Publication Date: 2021-01-26
XIAN UNIV OF TECH
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Problems solved by technology

[0004] The purpose of the present invention is to provide a variable-angle synchronous phase-shift interferometry method for gear tooth surface shape errors, which solves the problems of low precision and inability to realize full-field measurement in the prior art

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  • Variable-angle synchronous phase shift interference measurement method for gear tooth surface shape errors
  • Variable-angle synchronous phase shift interference measurement method for gear tooth surface shape errors
  • Variable-angle synchronous phase shift interference measurement method for gear tooth surface shape errors

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Embodiment Construction

[0065] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0066] A variable-angle synchronous phase-shift interferometry method for gear tooth surface shape errors, specifically implemented according to the following steps:

[0067] Step 1. Place the gear to be tested between the front double optical wedge 8 and the rear double optical wedge 9 in the interferometric optical path, and adjust the interferometric optical path. When the interferometric optical path is adjusted properly, the CCD camera 18 will capture the gear to be tested. Surface interference fringe image;

[0068] Step 2. By rotating the front double optical wedge 8 and the rear and front double optical wedge 9, the relative angle between the double optical wedges is changed, and the incident angle of the interferometric optical path irradiating the measured tooth surface of the measured gear is changed. In the case of measuring the ...

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Abstract

The invention discloses a variable-angle synchronous phase shift interference measurement method for gear tooth surface shape errors. A front double-optical wedge and a rear double-optical wedge are arranged along a measurement optical path. A structured light sensor is arranged along a scanning measurement light path, and a measured gear is placed between the front double-optical wedge and the rear double-optical wedge. Double optical wedges are introduced into a measurement optical path, and the angle of an incident angle irradiated to a measured tooth surface is quantitatively changed, so that the density distribution of interference fringes is adjusted, and phase data processing is facilitated. A structured light sensor is introduced into the interference measurement device, and the projected structured light can ensure full-field measurement during measurement of a large-helical-angle complex helical curved surface through relative movement with the surface of a measured object inthe measurement process and in combination with interference measurement data. According to the measuring method, the space phase shift technology is introduced into the interference measuring device, a plurality of phase shift interference patterns can be obtained through one-time measuring and shooting, operation process steps are simplified, and the anti-interference capability of the device is improved.

Description

technical field [0001] The invention belongs to the technical field of optical measurement, and relates to a variable-angle synchronous phase-shift interferometry method for gear tooth surface shape errors. Background technique [0002] As an important part of advanced rail transit and industrial robot transmissions, precision gears provide a guarantee for the high performance of transmissions due to their advantages such as high load capacity, high transmission efficiency, long life and low noise. In order to meet the requirements of high load-carrying capacity and high transmission efficiency of the transmission device, it is required that the gears must have higher manufacturing precision. Among the many indicators of gear accuracy evaluation, the tooth surface shape error has a huge impact on the transmission efficiency, noise and service life of the entire transmission device. Therefore, the measurement of tooth surface shape error is of great significance for the manu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 王晛方素平寇科翁浚
Owner XIAN UNIV OF TECH
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