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Pressure sensor

A technology of pressure sensor and pressure receiving surface, which is applied in the direction of measuring fluid pressure, instruments, and measuring fluid pressure through electromagnetic components, etc. It can solve the problems of pressure sensitivity changes, hinder accurate measurement, and influence, and achieve the effect of reducing influence

Inactive Publication Date: 2021-02-09
YAMATAKE HONEYWELL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This unwanted buildup on the diaphragm of the pressure sensor can lead to zero point shifts, changes in pressure sensitivity, etc., which, as is well known, prevent accurate measurements and can greatly affect the results of processing

Method used

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Experimental program
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Embodiment Construction

[0036] Below, refer to figure 1 A pressure sensor according to an embodiment of the present invention will be described. This pressure sensor includes: a diaphragm 102 that is displaceable and receives the pressure of the gas to be measured on the pressure receiving surface; and a measuring unit configured to measure the displacement of the diaphragm. The measurement unit of this pressure sensor includes a movable electrode 104 formed in a movable region 102 a of the diaphragm 102 , and a fixed electrode 105 formed opposite to the movable electrode 104 . This pressure sensor is a so-called capacitive pressure sensor.

[0037] The diaphragm 102 is arranged to be supported on a base 101 made of an insulator by a support portion 101 a and to be spaced apart from the base 101 in a movable region 102 a. The diaphragm 102 is bonded to the upper surface of the support portion 101a in a bonding region 102b outside the movable region 102a. In addition, the diaphragm 102 is displacea...

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PUM

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Abstract

The present invention addresses the problem of further reducing the influence of deposits on the diaphragm of a pressure sensor. This pressure sensor is provided with a movable electrode (104) formedon a movable region (102a) of a diaphragm (102), and a fixed electrode (105) formed so as to face the movable electrode (104). The pressure-receiving surface of the diaphragm (102) is made of a material that does not readily adsorb gas molecules. Alternatively, the entire diaphragm (102) may be made of a material that does not easily adsorb gas molecules, or the surface of the pressure-receiving surface of the diaphragm (102) may be made of a material that does not easily adsorb gas molecules. The diaphragm (102) is made of at least one of nitride, boride and carbide.

Description

technical field [0001] The invention relates to a pressure sensor. Background technique [0002] For example, pressure sensors that output a pressure value based on the amount of deflection of a diaphragm subjected to pressure, that is, the displacement, are widely used in industrial applications including semiconductor devices. In the manufacture of semiconductor devices, various film formation devices and dry etching devices using vapor deposition are used. In such a manufacturing device, in order to form a thin film with a thickness in nm, it is important to accurately control the pressure in the processing chamber, the partial pressure of the process gas, etc., and to measure the pressure accurately. To measure this pressure, a pressure sensor is used. [0003] In such pressure sensors, not only corrosion resistance to gases used in devices such as process gases, but also resistance to by-products generated in processes such as film formation are required. In addition...

Claims

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Application Information

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IPC IPC(8): G01L7/08G01L9/00
CPCG01L7/08G01L9/008G01L9/0042G01L9/0073
Inventor 石原卓也添田将关根正志
Owner YAMATAKE HONEYWELL CO LTD