Integrated circuit device

Abstract

An integrated circuit device includes a memory including a memory cell insulation surrounding a memory stack and a memory cell interconnection unit, a peripheral circuit including a peripheral circuitregion formed on a peripheral circuit board, and a peripheral circuit interconnection between the peripheral circuit region and the memory structure, a plurality of conductive bonding structures on aboundary between the memory cell interconnection and the peripheral circuit interconnection in a first region, the first region overlapping the memory stack in a vertical direction, and a through electrode penetrating one of the memory cell insulation and the peripheral circuit board and extended to a lower conductive pattern included in the peripheral circuit interconnection in a second region,the second region overlapping the memory cell insulation in the vertical direction.

Description

technical field [0001] The inventive concept relates to integrated circuit devices, and more particularly, to integrated circuit devices including nonvolatile memory devices having cell-on-peripheral (COP) structures. Background technique [0002] With the multifunctionalization of information communication devices, integrated circuit devices including memory devices have become large-capacity storage and highly integrated, so the size of memory cells has been gradually reduced, and memory devices included in memory devices Operating circuits and interconnect structures for operation and electrical connection are becoming more complex. Therefore, there is a need for an integrated circuit device including a memory device having a structure having excellent electrical characteristics while increasing the degree of integration. Contents of the invention [0003] The inventive concept provides an integrated circuit device having a structure capable of improving reliability of...

AI Technical Summary

Problems solved by technology

[0002] With the multifunctionalization of information communication devices, integrated circuit devices including memory devices have become large-capacity storage and highly integrated, so the size of memory cells has been gradually reduced, and memory devices included in memory devices Operating circuits and interconnect structures for operation and electrical connection are becoming more complex

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