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Method and appts. for controlling system using hierarchical state machines

A state machine and state technology, applied in the field of control systems, can solve problems such as reducing the overall adaptability of the system and increasing complexity

Inactive Publication Date: 2003-10-15
VARIAN SEMICON EQUIP ASSOC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, adding detailed system knowledge to the main program increases complexity, thereby reducing the overall adaptability of the entire system

Method used

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  • Method and appts. for controlling system using hierarchical state machines
  • Method and appts. for controlling system using hierarchical state machines
  • Method and appts. for controlling system using hierarchical state machines

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Embodiment Construction

[0077] Various embodiments of the invention will now be described with reference to the drawings, in which like elements will be designated by like numerals in the different drawings.

[0078] According to one aspect of the present invention, there is provided a Control System Architecture (CSA) of hierarchically coupled subsystems representing operational functions of a device. The method of controlling the device denoted CSA schedules the execution of the various subsystems according to the execution protocol. For each execution cycle of the device, the execution protocol completes the upward and downward execution of each subsystem. With such an arrangement, the operation of a complex system can be modularized into several subsystems, and the interrelationships among the various subsystems can be handled in a controlled manner according to a hierarchical structure.

[0079] One type of equipment that can be controlled by the control system architecture of the present inven...

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PUM

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Abstract

A method and apparatus for controlling complex systems includes hierarchically coupled subsystems representing operative functions of the system. The hierarchically coupled subsystems are coupled to collect command data from a user and signal data from the system. Each subsystem may include one or more state machines and one or more digital signal processing and conditioning unit (DSPCU) objects. The DSCPU objects accept process commands and convert control system signals into states for further processing by the state machines. Associated with the DSPCU of each subsystem is a data flow diagram for dictating an order of flow of commands and signals. A method of controlling the system schedules the execution of the subsystems according to an execution protocol. For each cycle of execution of the system, the hierarchically coupled subsystems are first analyzed in ascending order of the hierarchy, and then in descending order of the hierarchy.

Description

technical field [0001] This invention relates generally to control systems and, more particularly, to methods and apparatus for controlling complex systems using state machines. Background technique [0002] Many manufacturing systems typically perform a number of independent operations in a controlled manner in order to provide a desired output product. One example of such a manufacturing system is an ion implantation system. Ion implantation systems are used to implant ionized atoms or molecules into semiconductor wafers to ensure that the wafer acquires desired conductivity characteristics. Ion implantation systems can include a large number of mechanical components, such as ion beam generators and vacuum pumps, each of which is controlled individually. To guarantee a promising product output from this system, the interaction between the various mechanical components must be carefully controlled. [0003] The interaction between the various mechanical components of the...

Claims

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Application Information

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IPC IPC(8): H01L21/265G05B11/01G05B15/02G05B19/045G06F19/00
CPCG05B19/045G05B11/01G05B15/02
Inventor 加里·L·维维安尼尼科·A·帕里斯威廉姆·G·卡拉汉
Owner VARIAN SEMICON EQUIP ASSOC INC