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Wafer pre-aligner and method of pre-aligning wafer

A pre-alignment, wafer technology, applied in the direction of instrumentation, scientific instrumentation, semiconductor/solid-state device manufacturing, etc.

Pending Publication Date: 2021-03-09
YASKAWA DENKI KK +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Also, when the robot places the wafer on the chuck of the pre-aligner, the center of the wafer may not be aligned with the center of rotation of the chuck of the pre-aligner

Method used

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  • Wafer pre-aligner and method of pre-aligning wafer
  • Wafer pre-aligner and method of pre-aligning wafer
  • Wafer pre-aligner and method of pre-aligning wafer

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Embodiment Construction

[0023] Embodiments of the present invention will be described below with reference to the drawings. In the following description, constituent elements having substantially the same function and arrangement are denoted by the same reference numerals, and description is repeated only when necessary.

[0024] In semiconductor manufacturing, it is important to accurately determine the position (ie, position and orientation) of a semiconductor wafer in order to accurately perform a precise manufacturing process on the semiconductor wafer. Determining the position of a semiconductor wafer in certain processing stations is important as the wafers are moved from processing station to processing station, for example by using a robot such as an atmospheric articulated robot. For example, a pre-aligner may be used to identify the location of the indentations on the periphery of the semiconductor wafer such that the pre-aligner determines the location of the semiconductor wafer.

[0025]...

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Abstract

The invention relates to a wafer pre-aligner and a method of pre-aligning wafer. The pre-aligner for pre-aligning a wafer having a notch. The pre-aligner includes a wafer platform having a wafer receiving surface, and a drive device. A detector is provided to detect the notch, and a memory is provided to store a notch window defining a range of angles in which the notch is predicted to be locatedin relation to a start position. A controller performs a pre-alignment operation where the wafer is rotated from the start position to an alignment location. The controller performs the operation suchthat the wafer is rotated at maximum acceleration / deceleration values from the start position to a notch location detected by the detector: where the operation is limited to a maximum velocity for rotation of the wafer from the start position to a notch window; and where the operation is limited to a scanning velocity within the notch window until the notch location is detected.

Description

technical field [0001] The present invention relates to pre-alignment of semiconductor wafers. Background technique [0002] A pre-aligner is used to identify the location of the scribe on the semiconductor wafer. The robot places the wafer on the chuck of the pre-aligner. The pre-aligner rotates the wafer chuck, and thus the wafer, searching for nicks. With the score identified, the wafer can then be oriented to a final orientation dictated by the processing to be performed on the wafer. [0003] Upon reaching the pre-aligner, the position of the score may be anywhere relative to the pre-aligner, depending on previous processing performed on the wafer and / or robot movement operations. Therefore, in some related art pre-aligners, when searching for the notch, the pre-aligner must scan slowly from the rotation (i.e., scan at a speed not greater than the scanning speed, which is the pre-alignment the maximum speed at which the nick can be accurately detected by the pre-ali...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/68H01L21/67
CPCH01L21/681H01L21/67259H01L21/68H01L21/68764G01N21/43G01N21/9501
Inventor 约翰·查尔斯·罗杰斯玛格丽特·凯瑟琳·斯威奇基
Owner YASKAWA DENKI KK
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