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High-power microwave automatic blending device

A high-power, regulating device technology, applied in the microwave field

Pending Publication Date: 2021-03-19
成都迈频汇能科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a high-power microwave automatic allocation device for the above shortcomings, and to solve the problems that traditional microwave impedance matching technology is difficult to achieve real-time, fast and stable matching for dynamic loads.

Method used

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  • High-power microwave automatic blending device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] See attached Figure 1~4 . A high-power microwave automatic allocation device, including complex reflection coefficient measuring equipment and an adjuster; the adjuster includes a waveguide 1; the waveguide 1 is provided with several pin allocation devices 2 or several E-T allocation devices 3 or several A combination of pin allocation device 2 and E-T allocation device 3; said pin allocation device 2 includes a pin arm 4, a pin 5 and a pin adjustment device; said pin arm 4 is provided with a pin channel 6; said E-T allocation device 3 includes an E-T Arm 7, short-circuit piston 8 and piston adjustment device; said E-T arm 7 is provided with a piston cavity 9; said pin arm 4 and E-T arm 7 are all arranged on the broadside of waveguide 1; said complex reflection coefficient measuring equipment is used Adjusting the up and down position of the pin 5 along the pin channel 6 to change the insertion depth of the pin 5 into the waveguide 1 by controlling the pin adjusting d...

Embodiment 2

[0024] See attached Figure 1~4 . A high-power microwave automatic allocation device, including complex reflection coefficient measuring equipment and an adjuster; the adjuster includes a waveguide 1; the waveguide 1 is provided with several pin allocation devices 2 or several E-T allocation devices 3 or several A combination of pin allocation device 2 and E-T allocation device 3; said pin allocation device 2 includes a pin arm 4, a pin 5 and a pin adjustment device; said pin arm 4 is provided with a pin channel 6; said E-T allocation device 3 includes an E-T Arm 7, short-circuit piston 8 and piston adjustment device; said E-T arm 7 is provided with a piston cavity 9; said pin arm 4 and E-T arm 7 are all arranged on the broadside of waveguide 1; said complex reflection coefficient measuring equipment is used Adjusting the up and down position of the pin 5 along the pin channel 6 to change the insertion depth of the pin 5 into the waveguide 1 by controlling the pin adjusting d...

Embodiment 3

[0027] See attached Figure 1~4 . A high-power microwave automatic allocation device, including complex reflection coefficient measuring equipment and an adjuster; the adjuster includes a waveguide 1; the waveguide 1 is provided with several pin allocation devices 2 or several E-T allocation devices 3 or several A combination of pin allocation device 2 and E-T allocation device 3; said pin allocation device 2 includes a pin arm 4, a pin 5 and a pin adjustment device; said pin arm 4 is provided with a pin channel 6; said E-T allocation device 3 includes an E-T Arm 7, short-circuit piston 8 and piston adjustment device; said E-T arm 7 is provided with a piston cavity 9; said pin arm 4 and E-T arm 7 are all arranged on the broadside of waveguide 1; said complex reflection coefficient measuring equipment is used Adjusting the up and down position of the pin 5 along the pin channel 6 to change the insertion depth of the pin 5 into the waveguide 1 by controlling the pin adjusting d...

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Abstract

The invention discloses a high-power microwave automatic blending device, which belongs to the technical field of microwaves and comprises complex reflection coefficient measuring equipment and a blender, the blender comprises a waveguide; the waveguide is provided with a plurality of pin deploying devices or a plurality of E-T deploying devices or a combination of the plurality of pin deploying devices and the E-T deploying devices; and the complex reflection coefficient measuring equipment is used for controlling the pin adjusting device to adjust the vertical position of the pin along the pin channel so as to change the depth of the pin inserted into the waveguide and controlling the piston adjusting device to adjust the vertical position of the short-circuit piston along the piston cavity so as to change the depth of the short-circuit piston inserted into the piston cavity. According to the high-power microwave automatic blending device, the amplitude and phase information of the reflection coefficient can be accurately measured, so that the load impedance is calculated, real-time deploying of the deployer is achieved, and the utilization rate of microwave energy is increased.

Description

technical field [0001] The invention belongs to the field of microwave technology, and in particular relates to a high-power microwave automatic deployment device. Background technique [0002] The utilization rate of microwave energy largely depends on the impedance matching of microwave. Traditional microwave impedance matching technology is difficult to achieve real-time, fast and stable matching to dynamic loads, which limits the application of microwave systems in many fields. For example, in a microwave plasma system, the microwave plasma source can be equivalent to the load of the microwave transmission line, and the change of the physical and chemical properties of the microwave plasma can be reflected by the change of its impedance. Due to the dynamic characteristics of the plasma load impedance, it is not suitable to manually establish a fixed matching network. At this time, the automatic impedance adjuster can achieve impedance matching in a very short time, so t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/46H01P1/18H01P3/12
CPCH05H1/46H01P3/12H01P1/18
Inventor 董鹭
Owner 成都迈频汇能科技有限公司