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A locking device for gas excimer laser lens

An excimer laser and locking device technology, which is applied to gas laser parts, laser parts, instruments, etc., can solve the problems of tools falling off and scratching lenses, deformation of support rings, and different degrees of locking.

Active Publication Date: 2022-04-19
张家港梓阳电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the prior art, a very large torque is required to lock the threaded ring, which may easily cause the tool to fall off and scratch the lens; due to the different forces used during locking, the degree of locking is also different, resulting in poor sealing or deformation of the support ring

Method used

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  • A locking device for gas excimer laser lens

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Embodiment Construction

[0016] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, so as to define the protection scope of the present invention more clearly.

[0017] See attached figure 1 As shown, a locking device for a gas excimer laser lens includes a lens holder 1, and a lens 2, a spacer 3, a support ring 10 and a backing ring 4 are sequentially placed in the lens holder 1 from bottom to top (the material of the backing ring 4 is It can be copper, nickel, steel and other metals, the thickness is greater than 5mm and there is a certain difference between the inner and outer diameters, the difference is less than 10mm), the lens 2 and the spacer 3 are both located inside the support ring 10 and can be in contact with its inner side, the lens fixture 1 is provided with a sealing ring 9, and the sealin...

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Abstract

The invention discloses a locking device for a gas excimer laser lens, which comprises a lens clamp, in which a lens, a spacer, a support ring and a backing ring are sequentially placed in the lens clamp from bottom to top, and the inner side of the lens clamp is provided with A plurality of fixture grooves, the inside of the fixture groove is rotatably provided with rollers, the bottom of the rollers can be in contact with the backing ring, a locking plate is placed inside the lens fixture, and a plurality of balls are rotatably arranged on the outer side of the locking plate , the roller is provided with a fan-shaped groove, the ball can contact with the center angle of the fan-shaped groove, when the locking plate moves upward, it can drive the ball to move vertically along the upper half of the fan-shaped groove , the roller can rotate counterclockwise in the groove of the fixture and rotate on the backing ring, the device has a simple structure, can withstand high pressure without air leakage, and at the same time improve the locking stability of the lens.

Description

technical field [0001] The invention relates to the field of laser lenses, in particular to a locking device for a gas excimer laser lens. Background technique [0002] The optical lens of the gas excimer laser usually needs to be installed in a locking device, and then the locking device is installed at both ends of the laser cavity of the laser to play a sealing role. The existing locking device usually consists of a locking lens, a washer, a support ring, a threaded ring and a sealing ring. When fixing the lens between the lens holder and the support ring, it is necessary to use a special tool to screw the threaded ring, and then use the sealing ring and washer Seal it. [0003] In the prior art, a very large torque is required to lock the threaded ring, which may easily cause the tool to fall off and scratch the lens; due to the different forces used during locking, the degree of locking is also different, resulting in poor sealing or deformation of the support ring . ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B7/02H01S3/03
CPCG02B7/026H01S3/03
Inventor 赵靖
Owner 张家港梓阳电子科技有限公司
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