Metal-based flexible frame quartz differential resonant pressure sensor

Abstract

The invention relates to a metal-based flexible frame quartz differential resonant pressure sensor. The sensor comprises an integrated metal pressure differential conversion element, wherein two quartz double-end clamped tuning forks are connected to the integrated metal pressure differential conversion element, and upper caps are connected to the upper side of the integrated metal pressure differential conversion element and the outer sides of the two quartz double-end clamped tuning forks; vacuum sealing is formed; the lower side of the integrated metal pressure differential conversion element is connected with a lower cover plate, and the lower cover plate seals the PCB mounting chamber to complete common airtightness; the two quartz double-end fixing tuning forks are vertically and parallelly installed on the left side and the right side of the flexible frame in a crossed mode, one end of the flexible frame is integrally and fixedly connected with a to-be-measured pressure channel, and the other end of the flexible frame is integrally and fixedly connected with the fixed outer frame. By measuring the frequency change of the quartz double-end fixed tuning fork, the pressure information to be measured can be obtained, sensitivity can be improved, conjugate interference such as temperature drift can be inhibited, and the quartz double-end fixed tuning fork has the characteristics of digital signal output, high precision, strong anti-interference capability and the like.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronics (MEMS) digital pressure sensors, and in particular relates to a metal-based flexible frame quartz differential resonance pressure sensor. Background technique [0002] In the field of resonant pressure sensors, the sensor structure is divided into a pressure conversion unit and a resonance unit; the pressure conversion unit generally uses a pressure-sensitive film, bellows, etc., in order to form a differential output structure to suppress the conjugate interference of the sensor, and often Introducing mechanical signal transmission structures such as cantilever beams and flexible levers, additional structures require additional connection designs, alignment accuracy and connection strength will affect the overall accuracy and reliability of the sensor, and if the pressure conversion structure of different materials will cause thermal instability match, further disturbing the p...

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Problems solved by technology

[0002] In the field of resonant pressure sensors, the sensor structure is divided into a pressure conversion unit and a resonance unit; the pressure conversion unit generally uses a pressure-sensitive film, bellows, etc., in order to form a differential output structure to suppress the conjugate interference of the sensor, and often Introducing mechanical signal transmission structures such as cantilever beams and flexible levers, additional structures require additional connection designs, alignment accuracy and connection strength will affect the overall accuracy and reliability of the sensor, and if the pressure conversion structure of different materials will cause thermal instability match, further disturbing the performance of the pressure sensor

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