Data read-write method and control device of semiconductor processing equipment

Abstract

The invention provides a data read-write method and a control device of semiconductor processing equipment. The data read-write method comprises the following steps: S1, dividing a memory data area of a processor into a plurality of partitions; s2, establishing a plurality of memory mapping regions in one-to-one correspondence with the plurality of partitions; s3, monitoring a read identifier and a write identifier of each memory mapping area in real time; s4, correspondingly storing the data in the one or more partitions into the one or more memory mapping regions according to respective reading periods of the one or more memory mapping regions when monitoring that the reading identifiers of the one or more memory mapping regions are set to be read; and S5, correspondingly writing the data in the one or more memory mapping regions into the one or more partitions when monitoring that the writing identifiers of the one or more memory mapping regions are set to be written. According to the data read-write method provided by the invention, the read-write of redundant data can be effectively avoided, so that the read-write execution efficiency can be improved.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a data reading and writing method and a control device for semiconductor processing equipment. Background technique [0002] Semiconductor processing equipment generally uses a combination of lower-level computers (such as PCs) and processors such as PLCs to control various hardware in the equipment. PCs and PLCs can use standards such as Ethernet (Ethernet) or field bus (DeviceNet) and other networks to achieve data communication, and the communication is mainly realized by reading and writing to the memory of the PLC. [0003] Since semiconductor processing equipment usually includes a variety of control components such as flow control valves, mass flow controllers (MFC), vacuum pumps, heaters, etc., the amount of control signals is relatively large. However, the existing computer reads data every time It is necessary to read the data in the PLC memory as a whole, re...

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Problems solved by technology

[0003] Since semiconductor processing equipment usually includes a variety of control components such as flow control valves, mass flow controllers (MFC), vacuum pumps, heaters, etc., the amount of control signals is relatively large. However, the existing computer reads data every time It is necessary to read the data in the PLC memory as a whole, resulting in the data read this time including some redundant data that is not included in this requirement, which will not only occupy network communication resources and cause unnecessary communication pressure, but also cause the PC to Redundant data will be parsed, resulting in unnecessary CPU and memory consumption, increasing system resource pressure

In addition, when the PC writes data to the PLC memory, even a small amount of data needs to be written once alone, resulting in unnecessary communication pressure and reducing the efficiency of read and write execution

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