A laser-induced multi-scale microchannel self-assembly forming processing method

Abstract

The invention discloses a laser-induced multi-scale microchannel self-assembly forming processing method. Firstly, a plurality of parallel and spaced microgrooves and microstructures are laser-processed on the upper surface of a substrate, and then the substrate is fixed on the substrate to form a composite structure of the substrate. , and then apply a uniaxial compressive load to the plate-based composite structure to drive the substrate to undergo instability and deformation. The direction of the applied uniaxial compressive load is perpendicular to the extension direction of the microgroove. Finally, the substrate is separated from the substrate, and the deformed substrate is a microchannel with multi-scale effect that can enhance mass transfer and heat transfer prepared by self-assembly forming method. The above invention has the characteristics of simple manufacturing process, low cost, strong controllability, high efficiency and the like.

Description

technical field [0001] The invention relates to a microchannel forming processing method, in particular to a laser-induced multi-scale microchannel self-assembly forming processing method, belonging to the field of invention and manufacture of microchannels with enhanced mass and heat transfer performance. Background technique [0002] With the continuous development and progress of technology in the fields of semiconductor microelectronics, aerospace and energy chemical industry, the degree of integration of related devices and equipment is getting higher and higher, and the parameters of the size, quality and energy consumption of the heat exchange system are increasingly stringent. stringent requirements. Microchannel heat exchanger has significant advantages such as large specific surface area, high mass and heat transfer performance, light weight, small size, compact structure, and easy integrated packaging. The key to the mass and heat transfer performance of reactors...

AI Technical Summary

Problems solved by technology

However, due to the different material properties of the plate and the matrix, there are problems such as irregular microchannel corrugations and high forming pressure when the compressive load is directly applied to the plate / matrix composite structure.

The invention proposes a laser-induced multi-scale microchannel self-assembly forming processing method, which can solve the problems of irregular microchannel shape and high forming pressure in the corrugated microchannel prepared by directly compressing the plate / substrate; at the same time, the inventive technology Multiple corrugated microchannels with controllable morphology can be obtained at one time, which is an efficient processing technology for mass production of microchannels

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