Multi-chip mounting structure and preparation method thereof
A multi-chip and placement technology, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as difficulty in effectively realizing on-demand filling, difficulty in filling packaging structures, and large influence between steps. Improve process efficiency and product yield, reduce filling difficulty, and solve the effect of filling bubbles
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[0038] Such as figure 1 As shown, the present invention provides a kind of preparation method of multi-chip mounting structure, and described preparation method comprises the following steps:
[0039] S1, providing the substrate;
[0040] S2, attaching a chip assembly to be packaged on the substrate, the chip assembly to be packaged includes at least two chips to be packaged, and there is a distance between adjacent chips to be packaged;
[0041] S3, preparing an auxiliary filling layer on the chip assembly to be packaged, the auxiliary filling layer connecting each of the chips to be packaged;
[0042] S4, coating an underfill material on the periphery of the chip component to be packaged, so that at least the filling auxiliary layer, the underfill material, and the substrate form a cavity, and corresponding to the cavity, there is a gas inlet and a gas exit;
[0043] S5, applying negative pressure at the gas outlet, and correspondingly coating the underfill material at th...
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