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Combined repairing method for laser irradiation damage defect on surface of fused quartz element

A technology of laser irradiation and repair method, applied in glass forming, optical surface grinder, grinding/polishing equipment, etc., to improve repair quality, ensure surface quality and shape, and reduce surface defects

Active Publication Date: 2021-04-30
NAT UNIV OF DEFENSE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, at present, such methods only use CO2 laser, femtosecond laser and other technologies to repair large-scale damage defects, and do not deal with cluster-type small-size damage defects.

Method used

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  • Combined repairing method for laser irradiation damage defect on surface of fused quartz element
  • Combined repairing method for laser irradiation damage defect on surface of fused quartz element
  • Combined repairing method for laser irradiation damage defect on surface of fused quartz element

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Experimental program
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Embodiment Construction

[0038] like figure 1 As shown, the combined repair method for laser irradiation damage defects on the surface of fused silica components in this embodiment includes:

[0039] 1) Remove small damage points in batches from damaged samples;

[0040] 2) Repair the surface quality and surface shape of the damaged samples after removing small damage points in batches (see figure 1 , referred to in this embodiment as the type-preserving and property-preserving combination modification process);

[0041] 3) For the damaged sample after surface quality and surface shape repair, single-point repair is performed on the large damage point that has not been removed, and the repaired damaged sample is obtained.

[0042] In this embodiment, step 1) includes:

[0043] 1.1) Carry out damage detection and analysis on the damaged sample to obtain the minimum removal depth that meets the repair requirements;

[0044] 1.2) Using magnetorheology to uniformly remove the first specified depth, th...

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Abstract

The invention discloses a combined repairing method for a laser irradiation damage defect on the surface of a fused quartz element. The combined repairing method comprises the following steps: removing small damage points from a damaged sample piece in batches; carrying out surface quality and surface shape repair on the damaged sample pieces after the small damage points are removed in batches; and carrying out single-point repair on unremoved large damage points on the damaged sample piece subjected to surface quality and surface shape repair to obtain a repaired damaged sample piece. According to the method, through combination of the three steps of small damage defect removal, surface quality and surface shape recovery and large damage defect repair, large and small damage defects can be removed, the surface quality and the surface shape of a damaged sample piece are ensured, and the repair quality of the laser irradiation damage defects on the surface of the fused quartz element can be effectively improved.

Description

technical field [0001] The invention belongs to the technical field of optical materials and optical elements, and in particular relates to a combined repair method for laser irradiation damage defects on the surface of fused silica elements. Background technique [0002] With the rapid development of inertial confinement fusion devices and high-energy laser weapons in our country, our demand for strong light components is also increasing. The optical components under the current strong light system will inevitably be damaged by strong light. Once the damage occurs and grows, it will inevitably cause the system to fail to continue to work normally. In order to improve the service life of components and ensure the stable operation of the entire system, research on repairing damage or inhibiting the growth of damage defects is very important. [0003] At present, there are many methods for repairing surface damage of fused silica components, among which CO2 laser repair techn...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C23/00C03B20/00B24B13/01B24B1/00
CPCC03C23/0025C03B20/00B24B1/00B24B1/005B24B13/01
Inventor 宋辞邓明杰石峰张耀飞
Owner NAT UNIV OF DEFENSE TECH