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A Compensation Method for Phase Error in Deflection Measurement System

A measurement system and compensation method technology, applied in the field of optical engineering, can solve problems such as defocus, large phase deviation of point spread function, and coma

Active Publication Date: 2021-11-19
SPEEDBOT ROBOTICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the imaging process in deflection measurement contains severe coma, astigmatism, defocus, etc.
At the same time, the defocus of the screen pattern will further increase the size of the diffuse spot, so the convolution of the point spread function will introduce a larger phase deviation

Method used

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  • A Compensation Method for Phase Error in Deflection Measurement System
  • A Compensation Method for Phase Error in Deflection Measurement System
  • A Compensation Method for Phase Error in Deflection Measurement System

Examples

Experimental program
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Embodiment 1

[0033] Embodiment 1: Firstly, a 10mm germanium mirror is measured by using an off-axis deflection measurement system. The camera used is JAISP-20000C-USB with a resolution of 5120×3840 pixels, a frame rate of 16fps, and a USB3 interface. The focal length of the lens is 50mm, the display screen is iPad mini 2, the resolution is 2048×1536 pixels, and the single pixel size is 0.0784mm. In calculating the point spread function, the screen is divided into 35×35 areas, and 9 images are displayed in the horizontal and vertical directions respectively. Stripes, with frequency varying from 0 to 2 / 15. according to figure 1 The flow of calculates the continuous point spread function p(u, v; s, t) according to the image captured by the camera. Then use the four-step phase shift method to display the fringe pattern, and the actual horizontal and vertical fringe images taken are as follows image 3 shown. Perform phase demodulation and phase unwrapping respectively to get φ 1 , convolv...

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Abstract

The invention belongs to the technical field of optical engineering, in particular to a phase error compensation method in a deflection measurement system. The method of the present invention includes: adopting a light field modulation method to obtain a point spread function that varies with space; adopting multi-step phase shifting to collect multiple images, and obtaining a measurement phase through phase demodulation and unwrapping; convolving the collected image with the point spread function, Perform phase demodulation and unwrapping on the obtained image, obtain the phase and correct the phase. The method of the invention can effectively overcome the phase error caused by imaging aberration and defocus convolution effect, and improve the deflection measurement accuracy.

Description

technical field [0001] The invention belongs to the technical field of optical engineering, and in particular relates to a phase error compensation method in a deflection measurement system. Background technique [0002] Phase measurement deflectometry is an important method to measure complex optical surface shape. The display screen is used to project a series of phase-shifted sinusoidal fringes, and the phase demodulation and unwrapping are performed from the image captured by the camera. The object image point pair is established through the phase correspondence between the camera pixel and the screen pixel, and the incident light and the reflected light are separated. The bisector of the angle between them is taken as the normal direction of the measured point, and then the surface gradient is integrated to obtain the surface shape of the measured surface [Xu X, Zhang X, NiuZ, et al. Self-calibration of in situ monoscopic deflectometric measurement in precisionoptical ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/25
CPCG01B11/25
Inventor 张祥朝牛振岐陈雨诺
Owner SPEEDBOT ROBOTICS CO LTD
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