Five-axis equipment C-axis angle displacement measurement device and measurement calibration method
A technology for displacement measurement and axis angle, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of low measurement accuracy and inability to measure and calibrate the C-axis of five-axis equipment
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specific Embodiment approach 1
[0022] Specific implementation mode 1. Combination Figure 1 to Figure 5 Describe this embodiment, the C-axis angular displacement measuring device for five-axis equipment, including a test rod 1, a bracket 4, a dense ball bearing sleeve 5, a measuring shaft body 6, a first wire 9, a high-precision grating ruler slide 10, and a slide base 11, the second wire 12, the pulley 13 and the balance weight 14;
[0023] A locking thread nail 7 and a thread hanging pin 8 are processed on the outer surface of the measuring shafting body 6; one end of the first thread 9 is fastened by the locking thread nail 7, and the other end of the first thread 9 is fastened to One end of the slide base 11; the other end of the slide base 11 fastens the second wire 12, and the second wire 12 is fastened to the balance weight 14 after passing through the pulley 13;
[0024] The weight of the balance weight 14 straightens and tightens the first silk thread 9 and the second silk thread 12, and drives th...
specific Embodiment approach 2
[0030] Specific Embodiment 2. This embodiment adopts the measurement and calibration method of the C-axis angular displacement measuring device of the five-axis equipment described in the specific embodiment 1. When measuring and calibrating the angle of the C-axis circular grating or encoder, the C-axis circular grating or encoder All encoders have a reference zero point. When the C-axis drives the measuring shaft system body 6, an instruction is issued at the reference zero point of the C-axis circular grating or encoder, and the high-precision grating ruler or laser interferometer starts to record the displacement distance of the sliding table synchronously. The C-axis circular grating Or the angle information of the encoder grating and the displacement information of the high-precision grating ruler or laser interferometer are recorded synchronously. After one rotation to the reference zero point, the displacement of the high-precision grating ruler or laser interferometer c...
specific Embodiment approach 3
[0033] Specific Embodiment 3. This embodiment is an embodiment of the method for measuring and calibrating the C-axis angular displacement of a five-axis device described in Specific Embodiment 2. If the diameter of the outer circle of the measuring shaft body is The corresponding 1° arc length is 2mm, and the accuracy of the high-precision grating ruler or laser interferometer is 200nm, then the angular accuracy of the high-precision grating ruler or laser interferometer to calibrate the C-axis circular grating or encoder is 0.0001°, which is 0.36". If high If the precision grating ruler is subdivided electronically, or if the accuracy of the laser interferometer is 1nm in the laboratory, the angular accuracy of the high-precision grating ruler or laser interferometer to calibrate the C-axis circular grating or encoder is theoretically 0.000001°, which is 0.0036".
[0034] If the C-axis circular grating is set to have a pitch of 144,000 at 360°, 1° should be 4,000. Ideally, a...
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