Optical element defect inhibition equipment and method

Abstract

The invention provides optical element defect inhibition equipment and method. The optical element defect inhibition equipment comprises a purging device, an adsorption device, a first suction cup and a clean container, wherein the adsorption device, the purging device and the first suction cup are all installed in the clean container; an air outlet of the purging device faces a to-be-purged surface of an optical element; the first suction cup is arranged on a base of the clean container, and the first suction cup and an adsorption mechanism are oppositely arranged; the adsorption device is used for adsorbing an adsorption surface of the optical element, and the adsorption mechanism is driven by a lifting mechanism to adjust the optical element to a purging height; the purging device is used for purging the to-be-purged surface of the optical element; and the adsorption device is used for placing the purged optical element on the first suction cup for adsorption, and vacuum adsorption clamping of the optical element is completed through the first suction cup. Therefore, the technical problem that surface defects are prone to being generated in the vacuum adsorption clamping process of the optical element can be solved.

Description

technical field [0001] The present application relates to the field of optical elements, in particular, to a device and method for suppressing defects of optical elements. Background technique [0002] Since the optical element is easily deformed when the side is stressed, it will reduce the surface shape accuracy of the processed element. The introduction of surface contamination will affect the quality of the clamping adsorption at the edge. At present, the commonly used clamping method is adsorption clamping. During the adsorption clamping process, dust, chips and other tiny particles in the processing environment will be introduced between the optical element and the surface of the adsorption fixture, and the particles will be embedded in the optical element after being pressed in the interface. When the clamping surface is mounted, a brittle indentation will be formed, or scratches will be drawn on the clamping surface of the optical element, which will directly affect...

AI Technical Summary

Problems solved by technology

[0002] Since the optical element is easily deformed when the side is stressed, it will reduce the surface shape accuracy of the processed element. Introduce surface contamination, which will affect the quality of clamping and adsorption at the edge

At present, the commonly used clamping method is adsorption clamping. During the process of adsorption and clamping, tiny particles such as dust and chips in the processing environment will be introduced between the optical element and the surface of the adsorption fixture, and the particles will be embedded in the optical element after being pressed in the interface. When the clamping surface is mounted, a brittle indentation will be formed, or scratches will be drawn on the clamping surface of the optical element, which will directly affect the damage characteristics of the element and shorten the service life of the optical element

Therefore, there is a technical problem that optical components are prone to surface defects during the adsorption and clamping process

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