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A calibration jig for a manipulator used in semiconductor processing

A semiconductor and manipulator technology, used in manipulators, semiconductor/solid-state device manufacturing, manufacturing tools, etc., can solve problems such as uncertainty, affect the efficiency and accuracy of calibration, and reduce inaccuracies, save time, and ensure calibration. The effect of efficiency

Active Publication Date: 2022-03-08
ADVANCED MATERIALS TECH & ENG INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] There is a lack of a jig suitable for manipulators in the prior art. The original technology uses manual adjustment, puts the manipulator in, and determines the height standard with the naked eye. However, the determination of the standard with the naked eye itself has uncertainty, which affects the calibration. efficiency and accuracy

Method used

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  • A calibration jig for a manipulator used in semiconductor processing
  • A calibration jig for a manipulator used in semiconductor processing
  • A calibration jig for a manipulator used in semiconductor processing

Examples

Experimental program
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Effect test

Embodiment 1

[0037]This embodiment 1 introduces a calibration jig for a manipulator for semiconductor processing, including a base plate 1 and a top plate 2, guide columns 4 are fixedly connected to the left and right sides between the base plate 1 and the top plate 2, and the base plate 1 A hydraulic cylinder 7 is installed in the middle of the top, and the top of the hydraulic cylinder 7 is connected with a lifting plate 3, and the left and right sides of the lifting plate 3 are provided with guide holes adapted to the guide column 4, and the middle of the top of the lifting plate 3 A base 8 is movable, and the left and right sides of the bottom of the base 8 are provided with Y-shaped grooves 83, and the left and right sides of the top of the lifting plate 3 are fixed with Y-shaped stoppers 17 adapted to the Y-shaped grooves 83 , the front and rear sides of the top of the lifting plate 3 are provided with strip grooves 31, the bottom of the strip groove 31 is fixedly connected with a spr...

Embodiment 2

[0039] This embodiment 2 introduces a calibration jig for a manipulator for semiconductor processing, including a base plate 1 and a top plate 2, guide columns 4 are fixedly connected to the left and right sides between the base plate 1 and the top plate 2, and the base plate 1 A hydraulic cylinder 7 is installed in the middle of the top, and the top of the hydraulic cylinder 7 is connected with a lifting plate 3, and the left and right sides of the lifting plate 3 are provided with guide holes adapted to the guide column 4, and the middle of the top of the lifting plate 3 A base 8 is movable, and a jig body 10 is installed on the top of the base 8. A U-shaped plane 11 is milled on the top of the jig body 10. The height of the U-shaped plane 11 is 1.5 mm. The left and right sides of the base 8 are Both sides extend outward and are fixed with a fixed plate 9, the end of the fixed plate 9 away from the base 8 is not in contact with the guide column 4, the top of the outer wall of...

Embodiment 3

[0041] This embodiment 3 introduces a calibration jig for a manipulator for semiconductor processing, including a base plate 1 and a top plate 2, guide columns 4 are fixedly connected to the left and right sides between the base plate 1 and the top plate 2, and the base plate 1 A hydraulic cylinder 7 is installed in the middle of the top, and the top of the hydraulic cylinder 7 is connected with a lifting plate 3. The hydraulic cylinder 7 is connected to an external control device and a driving power supply through a wire, and a base 8 is movably installed in the middle of the top of the lifting plate 3. A jig body 10 is installed on the top of the base 8, and the top of the jig body 10 is milled with a U-shaped plane 11, and the left and right sides of the lifting plate 3 are provided with guide holes adapted to the guide column 4, and the top plate 2, a threaded rod 6 is installed in the middle, and a machine cover 5 is installed on the right side of the top of the top plate ...

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Abstract

The invention relates to the technical field of calibration jigs, in particular to a calibration jig for semiconductor processing manipulators, comprising a bottom plate and a top plate, a guide column is fixedly connected between the bottom plate and the top plate, a hydraulic cylinder is installed in the middle of the top of the bottom plate, and the top of the hydraulic cylinder is connected There is a lifting plate, a base is movable in the middle of the top of the lifting plate, a jig body is installed on the top of the base, horizontal positioning grooves are opened on the left and right sides of the bottom of the jig body, and longitudinal positioning slots are opened on the front and rear sides of the bottom middle of the jig body , the left and right sides of the top of the base are fixed with upwardly protruding horizontal positioning blocks, the front and rear sides of the middle of the base top are provided with upwardly protruding longitudinal positioning blocks, the top of the jig body is milled with a U-shaped plane, and the top of the outer wall of the guide column is set The casing is connected, and an electric telescopic rod is installed on one side of the outer wall of the casing, and a side limit plate is installed on the other end of the electric telescopic rod. This invention reduces the inaccuracy of artificial height adjustment, saves time, and ensures the calibration efficiency to the greatest extent. .

Description

technical field [0001] The invention relates to the technical field of semiconductor processing, in particular to a calibration jig for a manipulator used in semiconductor processing. Background technique [0002] The word "jig" is directly translated from Japanese Chinese characters, so jig is a typical foreign word. Give an example to illustrate: to install two screws on an arc-shaped electrical product, the operator holds the product with his left hand and the electric screwdriver with his right hand. This operation can be done for a short period of time, but over time it will cause excessive fatigue to the staff and reduce efficiency. The quality will decline. At this time, the process engineer will consider making a jig to assist the operation. Common fixtures include: automation equipment, tooling fixtures, test fixtures, SMT furnace fixtures, precision parts, blades, DVD read heads, etc. Simply put, it is an auxiliary production equipment on the production line, and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/687B25J19/00
CPCB25J19/00H01L21/68721
Inventor 廖海涛
Owner ADVANCED MATERIALS TECH & ENG INC