A moems accelerometer signal extraction device based on light source fluctuation suppression technology

Abstract

The invention provides a MOEMS accelerometer signal extraction device based on light source fluctuation suppression technology, which is composed of a piezoelectric excitation module, an MOEMS accelerometer, two sets of optical signal processing circuits and a laser closed-loop control circuit. Wherein, each group of optical signal processing circuits includes a photodetector, a low-noise amplifier, a band-pass filter, an analog demodulator, an A / D converter, and an FPGA control algorithm. The laser closed-loop control loop is composed of FPGA control algorithm, D / A converter, laser drive protection circuit and semiconductor laser. FPGA control algorithm is composed of digital demodulator module, filter module, multiplier module, divider module, scaling module, PI control module and signal generator module. The invention performs normalization processing on the intensity component of the light source in the output signal, realizes the light source fluctuation decoupling technology, and adopts the closed-loop control method of the light source intensity to effectively suppress the influence of the light source fluctuation on the output accuracy.

Description

technical field [0001] The invention relates to micro-opto-electromechanical systems (MOEMS) and micro-inertial device measurement and control technology, in particular to a MOEMS accelerometer signal extraction device based on light source fluctuation suppression technology. Background technique [0002] MOEMS accelerometer has the advantages of high theoretical accuracy, small size, and strong anti-electromagnetic interference ability, and has been considered as one of the most promising candidates in the field of inertial navigation in recent years. However, the optical weak signals of MOEMS accelerometers are easily affected by various noises and uncertainties of optical parameters, which brings challenges for MOEMS accelerometers to obtain theoretically high-precision signal processing. The research on MOEMS accelerometer signal detection scheme has been an important work in the past two decades. At present, the detection scheme that can take into account the volume, l...

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Problems solved by technology

[0005] In order to solve the above problems, the present invention designs a MOEMS accelerometer signal extraction device based on light source fluctuation suppression technology. The device uses FPGA as the main control chip, adopts the dual modulation mode of two optical signals, and realizes the The decoupling of light source fluctuations solves the problem of low output accuracy of the MOEMS accelerometer due to the existence of light source fluctuations in the prior art

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