Dynamic leveling system and dynamic leveling method in triaxial air bearing table control process
A technology for controlling the process and the air-floating table, which is applied in the control/regulation system, general control system, instruments, etc., can solve the problems such as the inability to interfere with the torque compensation, the reduction of the control accuracy of the air-floating table, and the reduction of the environmental adaptability of the air-floating table. Achieve the effect of improving control accuracy and strengthening environmental adaptability
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[0030] The technical solution of the present invention will be further described below in combination with specific embodiments and accompanying drawings.
[0031] Such as Figure 1-3 As shown, a dynamic leveling system in the control process of a three-axis air bearing platform according to the present invention mainly includes an attitude measurement system, an attitude control system, a communication system and a ground console.
[0032] Specifically, the attitude measurement system includes various attitude sensors, which are distributed on the air bearing platform body, and are used to complete the attitude measurement of the three-axis air bearing platform 1 body. In the present embodiment, attitude sensor comprises gyroscope 7, inclinometer 8, visual measuring system 9 ( figure 1 camera), the gyroscope 7 measures the angular acceleration of the air bearing platform, and the visual measurement system 9 measures the attitude of the air bearing platform in a non-contact m...
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