Inclined Roots Screw Compound Vacuum Pump

Abstract

The invention provides an oblique Roots-screw composite vacuum pump, which is provided with a pump body, and the inside of the pump body is provided with a front inner cavity and a compound rotor inner cavity, and a pair of intermeshing composite rotor inner cavity is provided The rotor, the composite rotor is fixed adjacent to the screw pump rotor, the screw pump rotor is provided with the screw pump rotor impeller, the screw pump rotor is fixed adjacent to the Roots pump rotor, and the roots pump rotor is provided with the Roots pump rotor blades in the circumferential direction There is a Roots pump rotor meshing surface between the rotor blades of the Roots pump, and the synchronous gears that mesh with each other are arranged in the front inner cavity as helical gears. The meshing surface of the pump rotor is oblique surface meshing. It solves the technical problems of unstable rotation meshing of the Roots rotor and the screw rotor, low reliability of the vacuum pump and short working life. The invention can be widely used in the vacuum treatment of the process chamber of the semiconductor industry and the vacuum treatment of the display equipment process chamber.

Description

technical field [0001] The invention relates to a vacuum pump, in particular to an oblique Roots screw composite vacuum pump. Background technique [0002] The development of modern industry has higher and higher requirements for vacuum pumps, especially with the development of semiconductor industry and display manufacturing industry, the requirements for vacuum treatment of process chambers are higher. [0003] Most of the existing vacuum pumps are large in volume and long in axial dimension. Due to many links in the vacuuming process, the energy consumption is high, and the long-term use cannot meet the requirements of energy saving; some vacuum pumps use Roots rotors and screw rotors. Composite rotor structure, but the positioning of Roots rotor and screw rotor in the circumferential direction mostly adopts the fixed form of keyway, which cannot meet the precise positioning in the circumferential direction, resulting in low assembly accuracy of the vacuum pump. There is...

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Problems solved by technology

[0004] The present invention aims at the fact that most of the existing vacuum pumps are large in volume and long in the axial direction. Due to many links in the process of vacuuming, the energy consumption is high, and the long-term use cannot meet the requirements of energy saving. Some vacuum pumps use Roots rotors. It has a composite rotor structure with the screw rotor, but the positioning of the Roots rotor and the screw rotor in the circumferential direction mostly adopts the fixed form of a keyway, which cannot meet the precise positioning in the circumferential direction, resulting in low assembly accuracy of the vacuum pump. During long-term operation, the Roots rotor and the There is rotational stress between the screw rotors, the rotational meshing of the Roots rotor and the screw rotor is unstable, the reliability of the vacuum pump is low, and the working life is short. A kind of oblique Roots-screw composite vacuum pump is provided. The vacuum pump is in the axial direction The size is short, the working parts of the Roots rotor and the screw rotor can be seamlessly connected, the work efficiency is high, and the long-term working power consumption is low. The positioning of the Roots part in the axial direction enables it to adapt to the meshing of the screw rotor, so that there is no stress interference between the Roots rotor and the screw rotor during work, and the Roots rotor and the screw rotor of the vacuum pump as a whole run smoothly, which improves the The operation reliability of the vacuum pump greatly improves the life of the vacuum pump

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