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Micro-electro-mechanical ultrasonic transducer and array

An ultrasonic and micro-electromechanical technology, applied in the direction of fluid using vibration, can solve the problems of complex assembly process, large volume, low overall integration, etc., and achieve the effect of reducing volume, small volume, and reducing components.

Pending Publication Date: 2021-07-23
SONOSEMI MEDICAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The embodiment of this application provides a micro-electromechanical ultrasonic transducer and array, which solves the problems of large volume, complex assembly process and low overall integration of existing ultrasonic transducers

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  • Micro-electro-mechanical ultrasonic transducer and array
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Embodiment Construction

[0030] Embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary, are only for explaining the present application, and should not be construed as limiting the present application.

[0031] In the description of the present application, it should be understood that the terms "first" and "second" are used for description purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of said features. In the description of the present application, "plurality" means two or more, unless otherwise specifically defined.

[00...

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Abstract

The invention provides a micro-electro-mechanical ultrasonic transducer and an array. The micro-electro-mechanical ultrasonic transducer comprises a substrate layer, a bottom electrode (30), a piezoelectric layer (40), a top electrode (50) and a passive layer (60), wherein a bottom electrode (30), a piezoelectric layer (40), the top electrode (50) and the passive layer (60) are sequentially stacked on the top surface of the substrate layer, the bottom electrode (30) and the top electrode (50) are correspondingly connected to different electrode terminals, a groove-shaped vacuum cavity (70) is formed in the top surface of the substrate layer, the top end of the groove-shaped vacuum cavity (70) is in contact with the bottom electrode (30), the groove-shaped vacuum cavity is used for providing a space for downward vibration of the bottom electrode (30), the piezoelectric layer (40), the top electrode (50) and the passive layer (60), and the passive layer (60) is for direct contact with a conventional acoustic transmission medium. According to the transducer, the problems that an existing ultrasonic transducer is large in size, complex in assembly process and low in overall integration degree are solved.

Description

technical field [0001] The present application relates to the technical field of ultrasonic transducers, in particular to a micro-electromechanical ultrasonic transducer and an array. Background technique [0002] With the rapid development of science and technology, ultrasonic technology and computer technology have been closely integrated, which has promoted the wide application of ultrasonic detection and ultrasonic echo imaging technology in medical, industrial, aerospace, automotive, and even consumer electronics and other fields. Especially in the field of medical ultrasound imaging, medical ultrasound has unique advantages such as good real-time performance, no damage, no pain, no ionizing radiation, and low cost. welcome. [0003] Ultrasonic transducers (also known as ultrasonic probes) are one of the key components of medical ultrasound imaging equipment, and their characteristics directly affect or even limit the performance of the entire equipment. Traditional u...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B06B1/06
CPCB06B1/06
Inventor 刘斌张婷
Owner SONOSEMI MEDICAL CO LTD