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Three-axis acceleration sensor

A technology of axis acceleration and sensors, applied in the field of MEMS, can solve the problems of cross-axis detection, low detection accuracy, bulky volume, etc., and achieve the effect of eliminating influence

Pending Publication Date: 2021-07-23
QST CORP
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Problems solved by technology

[0002] For the three-axis acceleration sensor, multiple mass blocks independent of each other are usually used in the prior art to sense the acceleration of different axes. The disadvantage is that the volume is large and the structure is complicated, which is not conducive to manufacturing
However, using a single mass block to detect the acceleration of the three axes is likely to lead to cross-axis detection, and the detection accuracy in the Z direction is low, and it is easily affected by external stress.

Method used

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Embodiment Construction

[0010] The specific implementation of the triaxial acceleration sensor provided by the present invention will be described in detail below in conjunction with the accompanying drawings.

[0011] attached figure 1 Shown is a schematic structural view of the three-axis acceleration sensor described in this specific embodiment, including: an outer frame 10 fixed on the substrate, and at least one anchor point 11 fixed on the substrate; The two relative directions are defined as the X direction and the Y direction, the plane where they are located is the XY plane, and the direction perpendicular to the XY plane is the Z direction. In this specific implementation manner, four anchor points are taken as an example for description, and the four anchor points are arranged symmetrically with respect to the center O point of the triaxial acceleration sensor, and are connected to each other by beams.

[0012] The first movable mass 121 is connected to the anchor point 11 through the fir...

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Abstract

The invention provides a three-axis acceleration sensor. The three-axis acceleration sensor comprises a substrate and at least one anchor point fixedly arranged on the substrate. The sensor also includes a first movable mass block, a second movable mass block, and a third movable mass block. The gravity centers of the second movable mass block and the third movable mass block are located on the two sides of the anchor point respectively. The two mass blocks with different center-of-gravity positions are arranged, and the influence of external stress on acceleration detection is eliminated through rotation of the mass blocks.

Description

technical field [0001] The invention relates to the field of MEMS, in particular to a three-axis acceleration sensor. Background technique [0002] For the three-axis acceleration sensor, in the prior art, a plurality of mass blocks independent of each other are usually used to sense the acceleration in different axes. The disadvantage is that the sensor is bulky and has a complex structure, which is not conducive to manufacture. However, using a single mass block to detect the acceleration of the three axes is likely to lead to cross-axis detection, and the detection accuracy in the Z direction is low, and it is easily affected by external stress. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a three-axis acceleration sensor, which can improve detection accuracy. [0004] In order to solve the above problems, the present invention provides a three-axis acceleration sensor, including a substrate and at least o...

Claims

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Application Information

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IPC IPC(8): G01P15/18G01P15/125
CPCG01P15/125G01P15/18
Inventor 谢国伟金怡颜培力
Owner QST CORP
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