A large-diameter substrate coating tool
A large-diameter mirror and substrate technology, which is applied in sputtering coating, vacuum evaporation coating, gaseous chemical coating, etc., to achieve the effect of ensuring consistency and improving precision
Active Publication Date: 2022-07-22
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
When coating, the use of conventional flat-supported coating tooling is no longer suitable for index requirements
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[0023] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0024] In the coating process, when the size of the substrate is small and the index accuracy is not high, the support of the coating tool is generally realized by a plane that is close to the substrate, or a collar of the same size as the substrate. However, in the case of large-diameter substrates and extremely high surface shape accuracy requirements, the substrate will have certain surface shape changes during use due to the comb...
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Abstract
The invention provides a large-diameter base coating tool, which belongs to the technical field of coating tool. The bottom surface of the optical element is provided with a supporting structure, the base is assembled in the groove, and a fixing structure is provided on the edge of the tool; the supporting structure is consistent with the supporting structure of the optical element after the coating is completed during operation, and is used in the coating process. The middle support base; the limiting structure is used to limit the translation of the base to keep the base stationary; the fixing structure is used to fix the tool on the sample stage of the coating machine. The large-diameter substrate coating tool of the invention can provide support conditions similar to the working environment, ensure the consistency of the substrate surface shape during the film deposition process and the final use condition, and effectively ensure the surface shape change of the substrate before and after coating.
Description
technical field [0001] The invention belongs to the technical field of coating tooling, and particularly relates to a large-diameter base coating tooling. Background technique [0002] Optical films are used in various fields such as industrial production, scientific research, work and life. With the development of technology, more stringent index requirements are put forward for optical films in some occasions. For example, in the EUV field, due to the physical properties of the material's absorption of short wavelengths and the refractive index approaching 1, the control of EUV light can only be achieved by using a Bragg reflector composed of alternating stacks of high and low refractive index materials. The plating of this type of optical film not only requires sub-nanometer control accuracy in the longitudinal direction, but also requires a certain surface shape index in the transverse direction. Typical mirrors used in EUV lithography machines use aspheric or free-for...
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IPC IPC(8): C23C14/50C23C16/458G02B1/10
CPCC23C14/50C23C16/4582C23C16/4581G02B1/10
Inventor 姚舜喻波邓文渊
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI