Vacuum-compatible planar optical element adjusting device

An optical element and adjustment device technology, applied in the field of optical instruments, can solve the problems of complex displacement adjustment structure of optical elements, unfavorable vacuum environment application, etc., and achieve the effects of increasing adjustment dimensions and structural transparency

Active Publication Date: 2021-09-07
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004]Based on the above problems, the present disclosure provides a vacuum-compatible planar optical element adjustment device to alleviate the relatively complex optical element displacement adjustment structure in the prior art, and the Conducive to technical issues such as vacuum environment applications

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  • Vacuum-compatible planar optical element adjusting device
  • Vacuum-compatible planar optical element adjusting device
  • Vacuum-compatible planar optical element adjusting device

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preparation example Construction

[0042] In an embodiment of the present disclosure, a vacuum compatible planar optical element adjustment device is provided, such as Figures 1 to 3 Shown, described preparation method comprises:

[0043] A planar optical element 1, including mutually perpendicular optical surfaces, side surfaces and bottom surfaces;

[0044] The first adjustment bracket 2 is connected with the planar optical element 1 and can move the planar optical element 1 within the plane where the optical surface is located;

[0045] The second adjustment bracket 3 is connected with the first adjustment bracket 2 and can move the planar optical element 1 in the plane where the side surface is located.

[0046] In the embodiment of the present disclosure, the planar optical element 1 includes a pin 9, and the pin 9 is connected to the first adjustment bracket 2 through a first spring 8, and the first spring 8 holds the plane The optical element 1 is connected against the first adjustment bracket 2 .

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Abstract

The invention provides a vacuum-compatible planar optical element adjusting device. The device comprises a planar optical element which comprises an optical surface, a side surface and a bottom surface perpendicular to one another, a first adjusting support which is connected with the planar optical element and can move the planar optical element in the plane where the optical surface is located, and a second adjusting support which is connected with the first adjusting support and can move the planar optical element in the plane where the side faces are located. The adjustment of translation in three standard directions and rotation around the standard directions of a space rectangular coordinate system of the optical element is realized; the number of the adjusting supports is increased, and the adjusting dimension of the optical element can be further increased. And the structure is transparent and can be used in a vacuum environment.

Description

technical field [0001] The disclosure relates to the technical field of optical instruments, in particular to a vacuum compatible planar optical element adjustment device. Background technique [0002] Planar optical elements are a type of element often used in optical systems, such as engraved crosshairs on the optical flat plate as alignment marks, diffractive optical elements with grating patterns engraved on the flat plate, etc. Adjusting the position of the patterned planar optical element is an important part of the optical system adjustment. The adjustment of this type of optical element not only needs to adjust the center of the pattern to coincide with the optical axis of the system, but also needs to adjust the element to The theoretical position on the optical path, while ensuring the spatial attitude of the component at the theoretical position, such as ensuring that the flat plane of the component is perpendicular to the optical axis. The traditional method is ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B7/00
CPCG02B7/00
Inventor 徐天伟王丹陈进新李璟王朋辉杨光华齐威
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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