Belt speed monitoring device of conveyor belt and application method of belt speed monitoring device

Abstract

The invention discloses a belt speed monitoring device of a conveyor belt and an application method of the belt speed monitoring device. The belt speed monitoring device comprises side support plates of the conveyor belt and a belt body of the conveyor belt, wherein the two ends of the belt body are arranged on a drive roller and a transmission roller in a sleeving mode respectively, the drive roller is fixedly connected with a rotating shaft of a servo motor, hinge shafts are formed at the two ends of the transmission roller, and the hinge shafts are connected to the side support plates in an inserted mode; and a friction roller sleeve is fixed on the transmission roller in an inserted and sleeved mode, the belt body is arranged on the friction roller sleeve in a sleeved mode and abuts against the friction roller sleeve, a groove is formed in the side end face of the friction roller sleeve, a window opposite to the groove is formed in one side support plate, a C-shaped fixed support opposite to the window is fixed on one side support plate, and a first counting sensor is fixed on the fixed support, and a probe of the first counting sensor is opposite to the groove on the friction roller sleeve.

Description

technical field [0001] The invention relates to the technical field of conveyor belts, more specifically to a belt speed monitoring device for conveyor belts and a method for using the same. Background technique [0002] At present, a conveyor belt is used in the transportation process of semiconductor wafers. The conveyor belt is driven by a motor, and the gearbox is used to convert the speed of the motor into the speed required by the process, thereby controlling the installation and the conveying speed of the wafer on the conveyor belt. Realize the uniform feeding of the conveyor belt to the wafer processing equipment. In the conveying mode of the above-mentioned conveyor belt, the speed of the conveyor belt is monitored by monitoring the speed of the motor, that is, the default motor speed is the speed of the conveyor belt. However, the disadvantage of this monitoring method is that after long-term operation, the conveyor belt and the drive shaft will wear against each ...

AI Technical Summary

Problems solved by technology

However, the disadvantage of this monitoring method is that after long-term operation, the conveyor belt and the drive shaft will wear against each other, causing the conveyor belt to slip, and the speed of the conveyor belt will change, and the pace of uniform wafer transportation will be disrupted. Therefore, it is necessary to design a speed monitoring device for the conveyor belt to avoid the slippage of the conveyor belt from affecting production

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