Fluid control device

Abstract

The present invention provides a fluid control device. The fluid control device comprises a block extending at a predetermined width in a longitudinal direction; an internal flow path formed in the block and extending in the longitudinal direction; a first control valve mounted to the block; and a second control valve mounted on the downstream side of the first control valve in the block. The internal flow path includes: a post-merging flow path in which fluid passing through the first control valve and the second control valve is merged and flows; a first outflow flow path connected between a first outflow port through which the fluid flows out from the first control valve and the post-merging flow path; a second outflow flow path connected between a second outflow port through which the fluid flows out of the second control valve and the post-merging flow path; and a second inflow flow path connected to a second inflow port through which a fluid flows into the second control valve. The first outflow flow path and the second inflow flow path are disposed so as to overlap at one point when the block is viewed in the width direction.

Description

technical field [0001] The invention relates to a fluid control device for controlling the flow rate and pressure of gas and other fluids. Background technique [0002] For example, in a semiconductor manufacturing process, a mass flow controller is used to control the flow rate of gas. In conventional mass flow controllers, fluid control devices such as pressure sensors and control valves are attached to blocks having internal flow channels formed therein. In order to compactly arrange a plurality of mass flow controllers, the block has an elongated rectangular parallelepiped shape extending with a predetermined width in the longitudinal direction (see Patent Document 1). [0003] More specifically, the width dimension of the block is determined to be, for example, 10 mm according to the specifications. In addition, a plurality of fluid control devices having substantially the same width dimension as the width dimension of the block are mounted side by side in the longitu...

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Problems solved by technology

[0005] However, although the maximum flow rate can be increased with the above structure, it is necessary to arrange fluid control devices such as two control valves in the width direction of the block, and it is difficult to make the mass flow controller more compact.

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