Precise ceramic workbench with quartz base

A technology of precision ceramics and worktables, applied in manufacturing tools, metal processing equipment, welding equipment, etc., can solve the problems of product yield impact, low efficiency, cost increase, etc., to achieve the best work efficiency and reduce costs.

Pending Publication Date: 2021-10-26
HOMMER TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, under repeated use, it is necessary to frequently remove the ceramic base and rework the ceramic base, which needs to be replaced after several times of rework, resulting in increased cost and low efficiency
In addition, the energy of the laser will also cause the ceramic base to generate ceramic dust, which will affect the yield of the product

Method used

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  • Precise ceramic workbench with quartz base
  • Precise ceramic workbench with quartz base
  • Precise ceramic workbench with quartz base

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Embodiment Construction

[0032] based on the following Figure 1 to Figure 5 , and the embodiment of the present invention will be described. This description is not intended to limit the embodiment of the present invention, but is one of examples of the present invention.

[0033] Such as figure 1 As shown, the size of the precision ceramic table 100 with a quartz base according to an embodiment of the present invention is suitable for an eight-inch wafer. In other embodiments, the precision ceramic workbench 100 has other larger or smaller sizes to match the wafers to be processed.

[0034] Wherein, the precision ceramic workbench 100 includes: a multi-hole precision ceramic disc 1 and a quartz base 2 .

[0035] Specifically, as figure 1 As shown, the multi-hole precision ceramic disc 1 is a porous material and has several through holes, and each through hole penetrates between the upper surface S1 and the lower surface of the multi-hole precision ceramic disc. The upper surface S1 of the multi...

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PUM

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Abstract

The invention relates to a precise ceramic workbench which comprises a multi-through-hole precise ceramic disc and a quartz base. The multi-through-hole precision ceramic plate is provided with multiple holes, and the upper surface of the multi-through-hole precision ceramic plate is a workpiece adsorption surface. The multi-through-hole precision ceramic plate is clamped on the quartz base. At least part of the surface of the quartz base is polished, so that the quartz base is prevented from being damaged by laser energy.

Description

technical field [0001] The invention relates to a precision ceramic worktable, in particular to a precision ceramic workbench with a quartz base. Background technique [0002] The precision ceramic work plate is a device that absorbs workpieces for processing. The precision ceramic work plate uses the air pump to generate suction to absorb the workpiece on the workpiece adsorption surface of the multi-hole precision ceramic plate. As a result, the position of the workpiece is fixed. The air pump can also provide air to the precision ceramic work disc, so that the workpiece can be desorbed or even suspended on the precision ceramic work disc. [0003] One of the commonly used materials for the base of the existing precision ceramic work disk is ceramics. In the cutting process, the laser has the opportunity to irradiate the ceramic base, so that the energy of the laser will cause damage to the surface of the ceramic base. Therefore, under repeated use, the ceramic base ne...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/38B23K26/70
CPCB23K26/38B23K26/70B23K26/702
Inventor 余俊荣
Owner HOMMER TECH
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