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Pollution source searching method based on AMC online monitoring system

A monitoring system and pollution source technology, applied in the field of pollution source search based on the AMC online monitoring system, can solve the problems of finding pollution sources, difficult to find the location and source of pollution sources, etc., to reduce the number of screenings, the detection method is simple and easy, and is suitable for popularization and application Effect

Pending Publication Date: 2021-11-02
L&K ENG SUZHOU
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] However, practical applications have found that when the AMC online monitoring system detects abnormal values, how to find the source of pollution has become a difficult problem
In view of this problem, the existing technology often can only rely on personal experience to make judgments, or to investigate and monitor. Even if a lot of human resources and time are spent, it is difficult to find the location and source of the pollution source. There is no systematic method to solve it.

Method used

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  • Pollution source searching method based on AMC online monitoring system
  • Pollution source searching method based on AMC online monitoring system
  • Pollution source searching method based on AMC online monitoring system

Examples

Experimental program
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Effect test

Embodiment 1

[0060] see Figure 1~3 As shown, a method for finding pollution sources based on the AMC online monitoring system includes the following steps:

[0061] (1) When an abnormal value is detected at a certain sampling point of the AMC online monitoring system, first determine the species of the pollutant;

[0062] (1a) First check whether other AMC online monitoring systems detect abnormal values, if so, it means that the source of pollutants comes from outside the clean room; if not, go to step (2);

[0063] (2) Investigate the sources of pollutants in the clean room space to be monitored, and eliminate the sources of pollutants that do not produce the pollutant species involved in the step (1);

[0064] (3) Computational fluid dynamics simulation is performed on the positive airflow in the clean room space to be monitored, and the air flow line from the outlet of the fan filter unit to the inlet of the fan filter unit in the clean room space to be monitored is obtained;

[006...

Embodiment 2

[0081] A method for finding pollution sources based on the AMC online monitoring system, its steps are the same as in Embodiment 1, the only difference is that in step (5), a movable sampling device is used to perform the above-mentioned steps (2), (3) and ( 4) The sources of the pollutants after the exclusion are further sampled and then further tested to determine the source of the pollutants.

Embodiment 3

[0083] A method for finding pollution sources based on the AMC online monitoring system, its steps are the same as in Embodiment 1, the only difference is that step (5) is: the machine after the above-mentioned steps (2), (3) and (4) are eliminated The machine is a suspicious machine;

[0084] Then close the above-mentioned suspicious machines successively, and simultaneously switch the AMC online monitoring system to the point when an abnormal value is found in the step (1), and be a single point detection mode, when the AMC online monitoring system detects an abnormal value , the machine is the source of pollutants.

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Abstract

The invention discloses a pollution source searching method based on an AMC on-line monitoring system. The method comprises the following steps: (1) when an abnormal value is measured at a certain sampling point of the AMC on-line monitoring system, firstly determining species of pollutants; (2) checking a pollutant source in a clean room space to be monitored, and excludingthe pollutant source which does not generate pollutant species involved in the step (1); (3) according to the airflow streamlines, excluding the streamlines which do not pass through the sampling points in the step (1) and pollutant sources in the set range of the sampling points; (4) according to the operating characteristics of the machines, excluding the inconsistent machines; and (5) further detecting the pollutant sources excluded in the steps (2), (3) and (4) by adopting movable detection equipment, so as to determine the sources of the pollutants. According to the method, no extra investment is added, the cost is low, the pollution source can be effectively found, and a systematic method is formed.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a method for searching pollution sources based on an AMC online monitoring system. Background technique [0002] The semiconductor integrated circuit (IC) industry has experienced exponential growth, with technological advancements in IC materials and design resulting in multiple generations of ICs, where each generation has smaller and more complex circuits than the previous generation. In the course of IC development, functional density has increased dramatically while geometry size has decreased. Often this scaling down process provides many benefits by increasing production efficiency and reducing associated costs. This scaling down increases the complexity of processing and producing ICs and also places higher and higher demands on the production environment (clean room). In particular, gaseous molecular contamination (AMC) has become an increasingly serious problem...

Claims

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Application Information

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IPC IPC(8): G01N33/00
CPCG01N33/0036G01N33/0037G01N33/0042G01N33/0062
Inventor 杨政谕
Owner L&K ENG SUZHOU
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