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Carrying table device

A technology for a carrier and a carrier plate, which is applied in the manufacturing of electrical components, semiconductor/solid-state devices, circuits, etc., can solve the problem that impurities such as dust are not easy to accumulate, and achieve the effect of improving pollution and improving product yield.

Pending Publication Date: 2021-11-09
CHANGXIN MEMORY TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the embodiments of the present invention is to provide a stage device, so that impurities such as dust are not easy to accumulate on the stage, thereby improving the problem of contamination of the photomask and improving product yield

Method used

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Embodiment Construction

[0021] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, various implementation modes of the present invention will be described in detail below in conjunction with the accompanying drawings. However, those of ordinary skill in the art can understand that, in each implementation manner of the present invention, many technical details are provided for readers to better understand the present application. However, even without these technical details and various changes and modifications based on the following implementation modes, the technical solution claimed in this application can also be realized.

[0022] The first embodiment of the present invention relates to a stage device, such as Figure 1 to Figure 4 As shown, it includes: a carrier platform 11, and a bearing plate 12 rotatably arranged on the carrier platform 11. In a non-working state, the carrier plate 12 is in an inclined position. In a worki...

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Abstract

The embodiment of the invention relates to the field of semiconductor manufacturing, and discloses a carrying table device. The carrying table device comprises a carrying table and a bearing plate rotatably arranged on the carrying table, wherein the bearing plate is in an inclined position in a non-working state, and the bearing plate is in a horizontal position in a working state. According to the carrying table device provided by the invention, impurities such as dust are not easy to accumulate on the carrying table, so that the problem that a photomask is polluted is solved, and the product yield is improved.

Description

technical field [0001] Embodiments of the present invention relate to the field of semiconductor manufacturing, and in particular to a stage device. Background technique [0002] In the semiconductor manufacturing process, in order to ensure that the number of dust and impurities in the workshop meets the production needs, the clean room usually maintains a certain pressure to promote the internal air to flow from the top to the bottom, so as to maintain the cleanliness of the clean room. [0003] The inventors have found that there are at least the following problems in the prior art: since the air in the clean room flows from the top to the bottom, it carries impurities such as dust in the air and moves downward, so that the dust and impurities are easily deposited on the carrier of the carrier device. Contamination of the photomask subsequently placed on the stage will lead to microscopic defects or macroscopic chromatic aberration in the product, which will seriously aff...

Claims

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Application Information

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IPC IPC(8): H01L21/687B08B5/02
CPCH01L21/68764H01L21/68785B08B5/02B08B11/02H01L21/67259H01L21/67775
Inventor 赵磊
Owner CHANGXIN MEMORY TECH INC