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System and method for measuring electrical characteristic of material

A technology for measuring systems and material layers, applied in the system field of electrical characteristics, can solve problems such as IC product manufacturing delays

Pending Publication Date: 2021-11-19
GLOBALFOUNDRIES U S INC MALTA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Such calibration activities involve some cost and cause delays in the manufacture of IC products

Method used

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  • System and method for measuring electrical characteristic of material
  • System and method for measuring electrical characteristic of material
  • System and method for measuring electrical characteristic of material

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Embodiment Construction

[0011] Various illustrative embodiments of the invention are described below. In the interest of clarity, not all features of an actual implementation are described in this specification. Of course, it should be understood that in the development of any such actual embodiment, a number of implementation-specific decisions must be made to achieve the developer's specific goals, such as adherence to system-related and business-related constraints ranging from a It will vary from one embodiment to another. In addition, it will be appreciated that such a development effort might be complex and time consuming, but would nevertheless be a routine undertaking for those of ordinary skill in the art having the benefit of this disclosure.

[0012] The inventive subject matter will now be described with reference to the accompanying drawings. Various structures, systems and devices are schematically depicted in the drawings for purposes of explanation only so as not to obscure the pres...

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Abstract

The invention relates to a system and a method for measuring an electrical characteristic of a material. An exemplary system disclosed herein includes a conductive probe adapted to contain an amount of mercury, where the conductive probe includes a conductive body having an outlet; and a mercury control system adapted to supply mercury to the conductive probe. In this example, the system further includes an image sensor adapted to obtain an image of a mercury droplet located on the surface of the material; and a measurement system adapted to receive the image of the mercury droplet and to calculate a contact area between the mercury droplet and the surface of the material based on the image of the mercury droplet.

Description

technical field [0001] The present disclosure generally relates to various novel embodiments of systems and methods for measuring electrical properties of materials. Background technique [0002] When fabricating integrated circuit products on semiconductor substrates, it is important to determine various electrical properties of the various material layers and / or substrates. One technique for performing such electrical testing involves the use of a measurement system that includes a vacuum-operated mercury probe to make conductive contact with the material being tested. Manufacturers of IC products often purchase these types of measurement systems from third-party suppliers. [0003] In order to measure at least some electrical properties (such as capacitance) of a material layer, it is important to accurately measure the contact area between the mercury droplet (dispensed from the mercury probe) and the surface of the material layer. This type of system relies on calibra...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/00
CPCG01N27/00G01R1/06783G01R31/2831G01N27/221G01B11/285
Inventor J·穆蒂H·迪克西特
Owner GLOBALFOUNDRIES U S INC MALTA