Ultra-low flow velocity measuring device and method based on atomic force microscope
An atomic force microscope, flow velocity measurement technology, applied in the direction of measuring device, fluid velocity measurement, velocity/acceleration/impact measurement, etc., can solve the problems of fluid flow fluctuation and difficult measurement, and achieve high sensitivity effect
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[0018] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0019] like Figure 1~3 As shown, the embodiment of the present invention discloses a very low flow rate measurement device based on an atomic force microscope, including: an atomic force microscope, a laser emitter, a four-quadrant photodetector (PSD) and a flow device, the flow device is used to simulate polar The flow of low flow rate liq...
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